Researching | Error and Precision Evaluation of a System for Inspecting Surface of Optical Plane

Acta Optica Sinica, Volume. 23, Issue 7, 879(2003)

Error and Precision Evaluation of a System for Inspecting Surface of Optical Plane

[in Chinese]^*

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References(2)

[1] [1] Bruning J H, Herriott D R, Gallagher J E et al.. Digital wavefront measuring interferometer for testing optical surfaces and lenses. Appl. Opt., 1974, 13(11):2693～2703

[2] [2] Schwider J, Burow R, Elssner K et al.. Digital wavefront measuring interferometer: Some systematic error sources. Appl. Opt., 1983, 22(21):3421～3431

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[in Chinese]. Error and Precision Evaluation of a System for Inspecting Surface of Optical Plane[J]. Acta Optica Sinica, 2003, 23(7): 879

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: May. 9, 2002

Accepted: --

Published Online: Jun. 27, 2006

The Author Email: (mwd1999@sohu.com)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology