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Optics and Precision Engineering, Volume. 23, Issue 11, 3107(2015)

MEMS manufacture process of high precision quartz hologram lens

HAN Li-xiang1,*... HUA Wei2, MA Jian-she1 and SU Ping1 |Show fewer author(s)
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    HAN Li-xiang, HUA Wei, MA Jian-she, SU Ping. MEMS manufacture process of high precision quartz hologram lens[J]. Optics and Precision Engineering, 2015, 23(11): 3107

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    Received: Jun. 1, 2015

    Accepted: --

    Published Online: Jan. 25, 2016

    The Author Email: Li-xiang HAN (lixiang-han@impcas.ac.cn)

    DOI:10.3788/ope.20152311.3107

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology