Journal of Applied Optics, Volume. 40, Issue 5, 779(2019)

Optical system design for on-line defects detection of optical components

ZHANG Wenxue1...2,3,*, WANG Jihong1,2,3, and REN Ge1,23 |Show fewer author(s)
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    References(15)

    [1] [1] YANG Yongying, LU Chunhua, LIANG Jiao, et al. Microscopic dark-field scattering imaging and digitalization evaluation system of defects on optical devices precision surface [J].Acta Optica Sinica , 2007, 27(6): 1032-1038.

    [2] [2] ZHAO Wenchuan, ZHONG Xianyun, LIU Bin, et al. The surface flaws inspection of optical components based on the fringe reflection[J]. Acta Photonica Sinica, 2014, 43(9): 161-165.

    [4] [4] CONDER A, AZEVEDO S, KEGELMEYER L, et al. Final optics damageinspection (FODI) for the national ignition facility[C].USA: SPIE, 2015: 953212-1.

    [5] [5] PENG Zhitao. Research on on-line laser damage detection technology for optical components of complex laser units[D]. Sichuan: Chinese Academy of Engineering Physics, 2011: 41-48.

    [6] [6] REN Bingqiang, HUANG Huijie, ZHANG Weixin, et al. Online inspection apparatus and experiments on optics damage[J]. High Power Laser and Particle Beams , 2004, 16(4), 466-468.

    [7] [7] CHENG Xiaofeng, XU Xu, ZHANG Lin, et al. Defect testing of large aperture optics based on high resolution CCD camera[J]. High Power Laser and Particle Beams, 2009, 21 (11), 1677-1680.

    [8] [8] HU Jixian. Design of large aperture and long focal length zoom optical system[J]. Journal of Applied Optics, 2007, 28(5): 569-577.

    [9] [9] FENG Bo, LIU Bingguo, CHEN Fengdong, et al.Final optics damage online inspection system for ICF [J]. Infrared and Laser Engineering, 2013, 42(9), 2520-2524.

    [12] [12] LI Xiaotong, QIN Zhaofeng. Geometrical optics·Aberrations·Optical design[M]. Zhejiang: Zhejiang University Press, 2007: 240-245.

    [14] [14] JIANG Lun, HUANG Wei. Lens design for optical system of high zoom ratio [J]. Acta Optica Sinica, 2011, 12(12): 1222006.

    [15] [15] LI Hongzhuang, ZHANG Zhenduo. Design of 20×double-linkage continuous zoom optical system [J]. Acta Optica Sinica, 2015, 35(2): 0222003.

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    ZHANG Wenxue, WANG Jihong, REN Ge. Optical system design for on-line defects detection of optical components[J]. Journal of Applied Optics, 2019, 40(5): 779

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    Paper Information

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    Received: May. 13, 2019

    Accepted: --

    Published Online: Nov. 5, 2019

    The Author Email: Wenxue ZHANG (19950219695@163.com)

    DOI:10.5768/jao201940.0501010

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