Opto-Electronic Engineering, Volume. 32, Issue 3, 82(2005)

[in Chinese]

[in Chinese] and [in Chinese]

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[in Chinese]

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References(3)

[5] [5] GAO Peng,SWEI Shan-min. A Six-degree-of-freedom micro-manipulator based on Piezoelectric translators [J].Nanotechnology,1999,10(1)：447-452.

[6] [6] JAE W RYU,DAE-GAB GWEON,KEES MOOM. Optimal design of a flexure hinge based XYQ Wafer Stage [J].Prec Eng,1997,21(1)：18-28.

[7] [7] PAROS J M, WEISBORD L. How to Design Flexure Hinge [J]. Machine Design,1965,37(27)：151-156.

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[in Chinese], [in Chinese]. [J]. Opto-Electronic Engineering, 2005, 32(3): 82

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Received: Feb. 3, 2004

Accepted: --

Published Online: Nov. 14, 2007

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