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Laser & Optoelectronics Progress, Volume. 57, Issue 23, 230004(2020)

Research Progress of Mid-Infrared Micro-Ring Resonator and Its Application

Yujie Hu1,2, Shuxiao Wang1,2, Dawei Wang1,2, Mingbin Yu1,2, and Yan Cai1,2、*
Author Affiliations
  • 1State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    References (74)
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    Figures & Tables(12)
    Micro-ring resonator. (a) All-pass micro-ring resonator[35]; (b) add-drop micro-ring resonator[36]

    Fig. 1. Micro-ring resonator. (a) All-pass micro-ring resonator[35]; (b) add-drop micro-ring resonator[36]

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    SEM images of each micro-ring resonator based on different silicon material platforms. (a)-(d) Optical microscope and SEM image of SOS ring resonators[12-14]; (e)(f) optical microscope and SEM image of SOI ring resonators[15-16]; (g)-(j) SEM image of suspended Si ring resonators[17</x

    Fig. 2. SEM images of each micro-ring resonator based on different silicon material platforms. (a)-(d) Optical microscope and SEM image of SOS ring resonators[12-14]; (e)(f) optical microscope and SEM image of SOI ring resonators[15-16]; (g)-(j) SEM image of suspended Si ring resonators[17

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    SEM images of each micro-ring resonator based on different material platforms. (a) SEM image of Ge ring resonator based on GeOI material platform[21]; (b) SEM image of GaAs ring resonator on top of a Al0.2Ga0.8As buffer layer[43]; (c)(d) SEM image of Ge ring resonator with air cladding and its quality factor value at operating wavelength[2

    Fig. 3. SEM images of each micro-ring resonator based on different material platforms. (a) SEM image of Ge ring resonator based on GeOI material platform[21]; (b) SEM image of GaAs ring resonator on top of a Al0.2Ga0.8As buffer layer[43]; (c)(d) SEM image of Ge ring resonator with air cladding and its quality factor value at operating wavelength[2

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    Chip layout and SEM image of mid-infrared Vernier cascaded micro-ring filter. (a) Chip of two racetrack resonators in a Vernier configuration[25]; (b)(c) SEM and optical microscope images of heating tunable Vernier ring resonator[48]

    Fig. 4. Chip layout and SEM image of mid-infrared Vernier cascaded micro-ring filter. (a) Chip of two racetrack resonators in a Vernier configuration[25]; (b)(c) SEM and optical microscope images of heating tunable Vernier ring resonator[48]

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    Schematic of cascaded micro-ring resonator based on Vernier effect for sensing field[47]

    Fig. 5. Schematic of cascaded micro-ring resonator based on Vernier effect for sensing field[47]

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    Experimental results. (a) Transmission spectrum of filtering and sensing micro-ring; (b) wavelength shift of transmission spectrum of sensing micro-ring in the presence of detected substance; (c) total transmission spectrum of the cascaded micro-ring resonator based on Vernier effect; (d) wavelength shift of transmission spectrum of cascaded micro-ring resonator in the presence of detected substance

    Fig. 6. Experimental results. (a) Transmission spectrum of filtering and sensing micro-ring; (b) wavelength shift of transmission spectrum of sensing micro-ring in the presence of detected substance; (c) total transmission spectrum of the cascaded micro-ring resonator based on Vernier effect; (d) wavelength shift of transmission spectrum of cascaded micro-ring resonator in the presence of detected substance

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    Schematic of optical frequency comb generation based on micro-ring resonator[66]

    Fig. 7. Schematic of optical frequency comb generation based on micro-ring resonator[66]

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    Experimental results of mid-infrared Kerr optical frequency comb. (a) Kerr optical frequency comb based on Si3N4 ring resonator[65]; (b) Kerr optical frequency comb based on non-etched silicon ring resonator[15]; (c) coherent mid-infrared optical frequency comb based on four-wave mixing and Raman effect interaction in silicon ring resonator[<xref ref-type="bibr" rid="b32

    Fig. 8. Experimental results of mid-infrared Kerr optical frequency comb. (a) Kerr optical frequency comb based on Si3N4 ring resonator[65]; (b) Kerr optical frequency comb based on non-etched silicon ring resonator[15]; (c) coherent mid-infrared optical frequency comb based on four-wave mixing and Raman effect interaction in silicon ring resonator[Download full size

    Property results of Ge strip waveguide. (a) Schematic of Ge-on-Si strip waveguide; (b) Schematic of Ge strip waveguide mode field(@3.5 μm); (c) dispersion of Ge strip waveguide

    Fig. 9. Property results of Ge strip waveguide. (a) Schematic of Ge-on-Si strip waveguide; (b) Schematic of Ge strip waveguide mode field(@3.5 μm); (c) dispersion of Ge strip waveguide

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    Simulation results at 3.5 μm wavelength pump. (a) Input the pump light(@3.5 μm, pump power is 80 mW ); (b) output the Kerr optical frequency comb

    Fig. 10. Simulation results at 3.5 μm wavelength pump. (a) Input the pump light(@3.5 μm, pump power is 80 mW ); (b) output the Kerr optical frequency comb

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    Simulation results at 4 μm wavelength pump. (a) Input the pump light(@4 μm, pump power is 112 mW ); (b) output the Kerr optical frequency comb

    Fig. 11. Simulation results at 4 μm wavelength pump. (a) Input the pump light(@4 μm, pump power is 112 mW ); (b) output the Kerr optical frequency comb

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    • Table 1. Performance of ring resonators based on different material platforms

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      Table 1. Performance of ring resonators based on different material platforms

      Types of waveguideMaterial platformOperating wavelength λ /μmQReference
      RibSOS5.53000[12]
      StripSOS2.7511400±800[13]
      StripSOS4.4151000[14]
      StripSOI2.6590000[15]
      StripSOI3.81.1×106[16]
      Suspended membraneSOI2.758100[17]
      Suspended membraneSOI3.57900[18]
      5.22700
      Suspended membraneSOI3.7983000[38]
      Suspended membraneSOI216600[19-20]
      StripSilicon on CaF25.262000[39]
      Suspended membraneGeOI2170[21]
      Suspended membraneGeOI2.1557000[22]
      Ribgraded SiGe83200[23]
      RibAlGaAs61900[43]
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    Yujie Hu, Shuxiao Wang, Dawei Wang, Mingbin Yu, Yan Cai. Research Progress of Mid-Infrared Micro-Ring Resonator and Its Application[J]. Laser & Optoelectronics Progress, 2020, 57(23): 230004

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    Paper Information

    Category: Reviews

    Received: Feb. 19, 2020

    Accepted: Apr. 13, 2020

    Published Online: Nov. 26, 2020

    The Author Email: Cai Yan (yan.cai@mail.sim.ac.cn)

    DOI:10.3788/LOP57.230004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology