Laser & Optoelectronics Progress, Volume. 59, Issue 13, 1300003(2022)
Research Progress in Laser Surface Polishing of Hard and Brittle Materials
Fig. 1. Comparison of long-pulse laser and ultra-fast pulse laser processing materials[7]
Fig. 2. Schematic diagram of surface periodic structure formed in the SOM mechanism[9]
Fig. 3. Multiphysics process of CO2 laser processing of fused silica optics[12]
Fig. 4. Influence of different polishing methods on surface roughness of materials[16]
Fig. 5. Polishing results at different laser scanning speeds[17]. (a) Not polished; (b) 90 mm/s; (c) 45 mm/s; (d) 20 mm/s
Fig. 6. Effect comparison before and after laser polishing [30]
Fig. 7. Scanning electron microscope images of the CVD-diamond surfaces [37]
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Yifan Xu, Jingzhen Shao, Ying Lin, Yangjie Shi, Xu Liang. Research Progress in Laser Surface Polishing of Hard and Brittle Materials[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1300003
Category: Reviews
Received: Jul. 8, 2021
Accepted: Aug. 23, 2021
Published Online: Jun. 9, 2022
The Author Email: Liang Xu (liangxu@aiofm.ac.cn)