Laser & Optoelectronics Progress, Volume. 59, Issue 13, 1300003(2022)

Research Progress in Laser Surface Polishing of Hard and Brittle Materials

Yifan Xu1,2, Jingzhen Shao1, Ying Lin1, Yangjie Shi1,2, and Xu Liang1、*
Author Affiliations
  • 1Anhui Institute of Optics and Fine Mechanics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, Anhui , China
  • 2University of Science and Technology of China, Hefei 230026, Anhui , China
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    Figures & Tables(7)
    Comparison of long-pulse laser and ultra-fast pulse laser processing materials[7]
    Schematic diagram of surface periodic structure formed in the SOM mechanism[9]
    Multiphysics process of CO2 laser processing of fused silica optics[12]
    Influence of different polishing methods on surface roughness of materials[16]
    Polishing results at different laser scanning speeds[17]. (a) Not polished; (b) 90 mm/s; (c) 45 mm/s; (d) 20 mm/s
    Effect comparison before and after laser polishing [30]
    Scanning electron microscope images of the CVD-diamond surfaces [37]
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    Yifan Xu, Jingzhen Shao, Ying Lin, Yangjie Shi, Xu Liang. Research Progress in Laser Surface Polishing of Hard and Brittle Materials[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1300003

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    Paper Information

    Category: Reviews

    Received: Jul. 8, 2021

    Accepted: Aug. 23, 2021

    Published Online: Jun. 9, 2022

    The Author Email: Liang Xu (liangxu@aiofm.ac.cn)

    DOI:10.3788/LOP202259.1300003

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