Optics and Precision Engineering, Volume. 19, Issue 3, 515(2011)

Straightness error measurement based on common-path compensation for laser beam drift

YOU Feng-ling*... FENG Qi-bo and ZHANG Bin |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    References(11)

    [4] [4] YIN CH Y,ZENG L J. An adaptive method and device for straightness measurement:China,89103290.8[P].1990. (in Chinese)

    [5] [5] Michael Reid Sogard. Laser interferometer having a sheath for the laser beam:US,5708505[P].

    [6] [6] ISHIDA A. Apparatus for measuring straightness:US,5333053[P].1994.

    [7] [7] FENG Q,ZHANG B,KUANG C.A straightness measurement system using a single-mode fiber-coupled laser module[J]. Optics & Technology,2004,36:279-283.

    [8] [8] FENG Q B,TIAN Q,LIANG J W. Display laser collimation system with fiber automatically[J].Chinese Journal of Scientific Instrument, 1994,15(4):363-366. (in Chinese)

    [9] [9] BORN M,WOLF E. Optics Principle[M]. Beijng:Pulishing House of Electronics Industry,2005:111-112.

    [10] [10] FANG ZH Y, YIN CH Y,LIANG J W. Study on high accuracy laser alignment technique(1)[J]. Aviation Metrology & Measurement Technology, 1997,17(1):3-6. (in Chinese)

    [11] [11] FANG ZH Y,YIN CH Y,LIANG J W. Study on high accuracy laser alignment technique(2)[J]. Aviation Metrology & Measurement Technology,1997,17(2):5-8. (in Chinese)

    CLP Journals

    [1] JIN Tao, LIU Jing-lin, YANG Wei, LE Yan-fen, HOU Wen-mei. High-precision straightness interferometer for linear moving stage[J]. Optics and Precision Engineering, 2018, 26(7): 1570

    Tools

    Get Citation

    Copy Citation Text

    YOU Feng-ling, FENG Qi-bo, ZHANG Bin. Straightness error measurement based on common-path compensation for laser beam drift[J]. Optics and Precision Engineering, 2011, 19(3): 515

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jul. 16, 2010

    Accepted: --

    Published Online: Mar. 30, 2011

    The Author Email: Feng-ling YOU (05118304@bjtu.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics