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Chinese Optics Letters, Volume. 9, Issue 2, 023102(2011)

Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range

Moyan Tan1, Haochuan Li1, Qiushi Huang1, Hongjun Zhou2, Tonglin Huo2, Xiaoqiang Wang1, and Jingtao Zhu1
Author Affiliations
  • 1Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology, Institute of Precision Optical Engineering, Physics Department, Tongji University, Shanghai 200092, China
  • 2National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
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    Moyan Tan, Haochuan Li, Qiushi Huang, Hongjun Zhou, Tonglin Huo, Xiaoqiang Wang, Jingtao Zhu. Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range[J]. Chinese Optics Letters, 2011, 9(2): 023102

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    Paper Information

    Received: May. 28, 2010

    Accepted: Oct. 21, 2010

    Published Online: Mar. 3, 2011

    The Author Email:

    DOI:10.3788/COL201109.023102

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology