Chinese Optics Letters, Volume. 9, Issue 2, 023102(2011)

Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range

Moyan Tan1, Haochuan Li1, Qiushi Huang1, Hongjun Zhou2, Tonglin Huo2, Xiaoqiang Wang1, and Jingtao Zhu1
Author Affiliations
  • 1Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology, Institute of Precision Optical Engineering, Physics Department, Tongji University, Shanghai 200092, China
  • 2National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
  • show less

    Aperiodic molybdenum/silicon (Mo/Si) multilayer designed as a broadband reflective mirror with mean reflectivity of 10% over a wide wavelength range of 12.5–28.5 nm at incidence angle of 5? is developed using a numerical optimized method. The multilayer is prepared using direct current magnetron sputtering technology. The reflectivity is measured using synchrotron radiation. The measured mean reflectivity is 7.0% in the design wavelength range of 12.5–28.5 nm. This multilayer broadband reflective mirror can be used in extreme ultraviolet measurements and will greatly simplify the experimental arrangements.

    Tools

    Get Citation

    Copy Citation Text

    Moyan Tan, Haochuan Li, Qiushi Huang, Hongjun Zhou, Tonglin Huo, Xiaoqiang Wang, Jingtao Zhu. Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range[J]. Chinese Optics Letters, 2011, 9(2): 023102

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: May. 28, 2010

    Accepted: Oct. 21, 2010

    Published Online: Mar. 3, 2011

    The Author Email:

    DOI:10.3788/COL201109.023102

    Topics