Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Photonics Research, Volume. 11, Issue 4, 669(2023)

Reconfigurable and nonvolatile terahertz lithography-free photonic devices based on phase change films

Xieyu Chen1, Shoujun Zhang1, Kuan Liu2, Yuehong Xu1, Xiaohan Jiang1, Haiyang Li2, Xi Feng1, Qingwei Wang1, Yongchang Lu1, Kemeng Wang1, Tun Cao2,4, and Zhen Tian1,3、*
Author Affiliations
  • 1Center for Terahertz Waves and College of Precision Instrument and Optoelectronics Engineering, Key Laboratory of Optoelectronic Information Technology (Ministry of Education of China), Tianjin University, Tianjin 300072, China
  • 2School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China
  • 3Georgia Tech Shenzhen Institute (GTSI), Tianjin University, Shenzhen 518067, China
  • 4e-mail: caotun1806@dlut.edu.cn
    • show less
    Full TextGet PDF
    Figures&Tables (7)
    Equations (6)
    References (78)
    Cited By (4)
    Tools
    Paper Information
    Topics
    References(78)

    [1] T. Nagatsuma, G. Ducournau, C. C. Renaud. Advances in terahertz communications accelerated by photonics. Nat. Photonics, 10, 371-379(2016).

    [2] Y. Yang, Y. Yamagami, X. Yu, P. Pitchappa, J. Webber, B. Zhang, M. Fujita, T. Nagatsuma, R. Singh. Terahertz topological photonics for on-chip communication. Nat. Photonics, 14, 446-451(2020).

    [3] A. Kumar, M. Gupta, P. Pitchappa, N. Wang, P. Szriftgiser, G. Ducournau, R. Singh. Phototunable chip-scale topological photonics: 160 Gbps waveguide and demultiplexer for THz 6G communication. Nat. Commun., 13, 5404(2022).

    [4] J. Li, Y. Yao, L. Jiang, S. Li, Z. Yi, X. Chen, Z. Tian, W. Zhang. Time-domain terahertz optoacoustics: manipulable water sensing and dampening. Adv. Photon., 3, 026003(2021).

    [5] H. Guerboukha, K. Nallappan, M. Skorobogatiy. Toward real-time terahertz imaging. Adv. Opt. Photon., 10, 843-938(2018).

    [6] T. Kan, A. Isozaki, N. Kanda, N. Nemoto, K. Konishi, H. Takahashi, M. Kuwata-Gonokami, K. Matsumoto, I. Shimoyama. Enantiomeric switching of chiral metamaterial for terahertz polarization modulation employing vertically deformable MEMS spirals. Nat. Commun., 6, 8422(2015).

    [7] M. Manjappa, P. Pitchappa, N. Singh, N. Wang, N. I. Zheludev, C. Lee, R. Singh. Reconfigurable MEMS Fano metasurfaces with multiple–input–output states for logic operations at terahertz frequencies. Nat. Commun., 9, 4056(2018).

    [8] X. Cai, R. Tang, H. Zhou, Q. Li, S. Ma, D. Wang, T. Liu, X. Ling, W. Tan, Q. He, S. Xiao, L. Zhou. Dynamically controlling terahertz wavefronts with cascaded metasurfaces. Adv. Photon., 3, 036003(2021).

    [9] H. T. Chen, W. J. Padilla, J. M. Zide, A. C. Gossard, A. J. Taylor, R. D. Averitt. Active terahertz metamaterial devices. Nature, 444, 597-600(2006).

    [10] K. Fan, J. Zhang, X. Liu, G. F. Zhang, R. D. Averitt, W. J. Padilla. Phototunable dielectric Huygens’ metasurfaces. Adv. Mater., 30, 1800278(2018).

    [11] L. Cong, Y. K. Srivastava, H. Zhang, X. Zhang, J. Han, R. Singh. All-optical active THz metasurfaces for ultrafast polarization switching and dynamic beam splitting. Light Sci. Appl., 7, 28(2018).

    [12] X. Y. Chen, S. Ghosh, Q. Xu, C. M. Ouyang, Y. F. Li, X. D. Zhang, Z. Tian, J. D. Gu, L. Y. Liu, A. K. Azad, J. G. Han, W. L. Zhang. Active control of polarization-dependent near-field coupling in hybrid metasurfaces. Appl. Phys. Lett., 113, 061111(2018).

    [13] B. Sensale-Rodriguez, R. Yan, M. M. Kelly, T. Fang, K. Tahy, W. S. Hwang, D. Jena, L. Liu, H. G. Xing. Broadband graphene terahertz modulators enabled by intraband transitions. Nat. Commun., 3, 780(2012).

    [14] S. H. Lee, M. Choi, T. T. Kim, S. Lee, M. Liu, X. Yin, H. K. Choi, S. S. Lee, C. G. Choi, S. Y. Choi, X. Zhang, B. Min. Switching terahertz waves with gate-controlled active graphene metamaterials. Nat. Mater., 11, 936-941(2012).

    [15] S. J. Kindness, N. W. Almond, B. B. Wei, R. Wallis, W. Michailow, V. S. Kamboj, P. Braeuninger-Weimer, S. Hofmann, H. E. Beere, D. A. Ritchie, R. Degl’Innocenti. Active control of electromagnetically induced transparency in a terahertz metamaterial array with graphene for continuous resonance frequency tuning. Adv. Opt. Mater., 6, 1800570(2018).

    [16] X. Chen, Z. Tian, Y. Lu, Y. Xu, X. Zhang, C. Ouyang, J. Gu, J. Han, W. Zhang. Electrically tunable perfect terahertz absorber based on a graphene Salisbury screen hybrid metasurface. Adv. Opt. Mater., 8, 1900660(2019).

    [17] Y. K. Srivastava, A. Chaturvedi, M. Manjappa, A. Kumar, G. Dayal, C. Kloc, R. Singh. MoS2 for ultrafast all-optical switching and modulation of THz Fano metaphotonic devices. Adv. Opt. Mater., 5, 1700762(2017).

    [18] Y. Hu, T. Jiang, J. H. Zhou, H. Hao, H. Sun, H. Ouyang, M. Y. Tong, Y. X. Tang, H. Li, J. You, X. Zheng, Z. J. Xu, X. G. Cheng. Ultrafast terahertz transmission/group delay switching in photoactive WSe2-functionalized metaphotonic devices. Nano Energy, 68, 104280(2020).

    [19] S. Savo, D. Shrekenhamer, W. J. Padilla. Liquid crystal metamaterial absorber spatial light modulator for THz applications. Adv. Opt. Mater., 2, 275-279(2014).

    [20] O. Buchnev, N. Podoliak, K. Kaltenecker, M. Walther, V. A. Fedotov. Metasurface-based optical liquid crystal cell as an ultrathin spatial phase modulator for THz applications. ACS Photon., 7, 3199-3206(2020).

    [21] Z. X. Shen, S. H. Zhou, X. A. Li, S. J. Ge, P. Chen, W. Hu, Y. Q. Lu. Liquid crystal integrated metalens with tunable chromatic aberration. Adv. Photon., 2, 036002(2020).

    [22] A. Chanana, X. Liu, C. Zhang, Z. V. Vardeny, A. Nahata. Ultrafast frequency-agile terahertz devices using methylammonium lead halide perovskites. Sci. Adv., 4, eaar7353(2018).

    [23] T. Driscoll, H. T. Kim, B. G. Chae, B. J. Kim, Y. W. Lee, N. M. Jokerst, S. Palit, D. R. Smith, M. Di Ventra, D. N. Basov. Memory metamaterials. Science, 325, 1518-1521(2009).

    [24] H. L. Cai, S. Chen, C. W. Zou, Q. P. Huang, Y. Liu, X. Hu, Z. P. Fu, Y. Zhao, H. C. He, Y. L. Lu. Multifunctional hybrid metasurfaces for dynamic tuning of terahertz waves. Adv. Opt. Mater., 6, 1800257(2018).

    [25] C. H. Zhang, G. H. Zhou, J. B. Wu, Y. H. Tang, Q. Y. Wen, S. X. Li, J. G. Han, B. B. Jin, J. Chen, P. H. Wu. Active control of terahertz waves using vanadium-dioxide-embedded metamaterials. Phys. Rev. Appl., 11, 054016(2019).

    [26] M. Liu, E. Plum, H. Li, S. Li, Q. Xu, X. Zhang, C. Zhang, C. Zou, B. Jin, J. Han, W. Zhang. Temperature-controlled optical activity and negative refractive index. Adv. Funct. Mater., 31, 2010249(2021).

    [27] Y. Zhao, L. Wang, Y. Zhang, S. Qiao, S. Liang, T. Zhou, X. Zhang, X. Guo, Z. Feng, F. Lan, Z. Chen, X. Yang, Z. Yang. High-speed efficient terahertz modulation based on tunable collective-individual state conversion within an active 3 nm two-dimensional electron gas metasurface. Nano Lett., 19, 7588-7597(2019).

    [28] S. Venkatesh, X. Y. Lu, H. Saeidi, K. Sengupta. A high-speed programmable and scalable terahertz holographic metasurface based on tiled CMOS chips. Nat. Electron., 3, 785-793(2020).

    [29] H. Zeng, H. Liang, Y. Zhang, L. Wang, S. Liang, S. Gong, Z. Li, Z. Yang, X. Zhang, F. Lan, Z. Feng, Y. Gong, Z. Yang, D. M. Mittleman. High-precision digital terahertz phase manipulation within a multichannel field perturbation coding chip. Nat. Photonics, 15, 751-757(2021).

    [30] S. Busch, B. Scherger, M. Scheller, M. Koch. Optically controlled terahertz beam steering and imaging. Opt. Lett., 37, 1391-1393(2012).

    [31] Z. W. Xie, X. K. Wang, J. S. Ye, S. F. Feng, W. F. Sun, T. Akalin, Y. Zhang. Spatial terahertz modulator. Sci. Rep., 3, 3347(2013).

    [32] N. Kamaraju, A. Rubano, L. K. Jian, S. Saha, T. Venkatesan, J. Notzold, R. K. Campen, M. Wolf, T. Kampfrath. Subcycle control of terahertz waveform polarization using all-optically induced transient metamaterials. Light Sci. Appl., 3, e155(2014).

    [33] Y. Yang, N. Kamaraju, S. Campione, S. Liu, J. L. Reno, M. B. Sinclair, R. P. Prasankumar, I. Brener. Transient GaAs plasmonic metasurfaces at terahertz frequencies. ACS Photon., 4, 15-21(2016).

    [34] J. Y. Guo, T. Wang, H. Zhao, X. K. Wang, S. F. Feng, P. Han, W. F. Sun, J. S. Ye, G. Situ, H. T. Chen, Y. Zhang. Reconfigurable terahertz metasurface pure phase holograms. Adv. Opt. Mater., 7, 1801696(2019).

    [35] B. J. Eggleton, B. Luther-Davies, K. Richardson. Chalcogenide photonics. Nat. Photonics, 5, 141-148(2011).

    [36] M. Wuttig, H. Bhaskaran, T. Taubner. Phase-change materials for non-volatile photonic applications. Nat. Photonics, 11, 465-476(2017).

    [37] F. Ding, Y. Yang, S. I. Bozhevolnyi. Dynamic metasurfaces using phase-change chalcogenides. Adv. Opt. Mater., 7, 1801709(2019).

    [38] Q. Wang, E. T. F. Rogers, B. Gholipour, C.-M. Wang, G. Yuan, J. Teng, N. I. Zheludev. Optically reconfigurable metasurfaces and photonic devices based on phase change materials. Nat. Photonics, 10, 60-65(2015).

    [39] P. Li, X. Yang, T. W. Mass, J. Hanss, M. Lewin, A. K. Michel, M. Wuttig, T. Taubner. Reversible optical switching of highly confined phonon-polaritons with an ultrathin phase-change material. Nat. Mater., 15, 870-875(2016).

    [40] X. Yin, T. Steinle, L. Huang, T. Taubner, M. Wuttig, T. Zentgraf, H. Giessen. Beam switching and bifocal zoom lensing using active plasmonic metasurfaces. Light Sci. Appl., 6, e17016(2017).

    [41] K. V. Sreekanth, S. Han, R. Singh. Ge2Sb2Te5-based tunable perfect absorber cavity with phase singularity at visible frequencies. Adv. Mater., 30, 1706696(2018).

    [42] K. V. Sreekanth, Q. Ouyang, S. Sreejith, S. Zeng, W. Lishu, E. Ilker, W. Dong, M. ElKabbash, Y. Ting, C. T. Lim, M. Hinczewski, G. Strangi, K.-T. Yong, R. E. Simpson, R. Singh. Phase-change-material-based low-loss visible-frequency hyperbolic metamaterials for ultrasensitive label-free biosensing. Adv. Opt. Mater., 7, 1900081(2019).

    [43] N. Farmakidis, N. Youngblood, X. Li, J. Tan, J. L. Swett, Z. Cheng, C. D. Wright, W. H. P. Pernice, H. Bhaskaran. Plasmonic nanogap enhanced phase-change devices with dual electrical-optical functionality. Sci. Adv., 5, eaaw2687(2019).

    [44] J. Tian, H. Luo, Y. Yang, F. Ding, Y. Qu, D. Zhao, M. Qiu, S. I. Bozhevolnyi. Active control of anapole states by structuring the phase-change alloy Ge2Sb2Te5. Nat. Commun., 10, 396(2019).

    [45] B. Gholipour, D. Piccinotti, A. Karvounis, K. F. MacDonald, N. I. Zheludev. Reconfigurable ultraviolet and high-energy visible dielectric metamaterials. Nano Lett., 19, 1643-1648(2019).

    [46] F. Zhang, X. Xie, M. Pu, Y. Guo, X. Ma, X. Li, J. Luo, Q. He, H. Yu, X. Luo. Multistate switching of photonic angular momentum coupling in phase-change metadevices. Adv. Mater., 32, 1908194(2020).

    [47] L. B. Mao, Y. Li, G. X. Li, S. Zhang, T. Cao. Reversible switching of electromagnetically induced transparency in phase change metasurfaces. Adv. Photon., 2, 056004(2020).

    [48] Y. Wang, P. Landreman, D. Schoen, K. Okabe, A. Marshall, U. Celano, H. P. Wong, J. Park, M. L. Brongersma. Electrical tuning of phase-change antennas and metasurfaces. Nat. Nanotechnol., 16, 667-672(2021).

    [49] S. Abdollahramezani, O. Hemmatyar, M. Taghinejad, H. Taghinejad, Y. Kiarashinejad, M. Zandehshahvar, T. Fan, S. Deshmukh, A. A. Eftekhar, W. Cai, E. Pop, M. A. El-Sayed, A. Adibi. Dynamic hybrid metasurfaces. Nano Lett., 21, 1238-1245(2021).

    [50] Y. Zhang, C. Fowler, J. Liang, B. Azhar, M. Y. Shalaginov, S. Deckoff-Jones, S. An, J. B. Chou, C. M. Roberts, V. Liberman, M. Kang, C. Rios, K. A. Richardson, C. Rivero-Baleine, T. Gu, H. Zhang, J. Hu. Electrically reconfigurable non-volatile metasurface using low-loss optical phase-change material. Nat. Nanotechnol., 16, 661-666(2021).

    [51] C. H. Kodama, R. A. Coutu. Tunable split-ring resonators using germanium telluride. Appl. Phys. Lett., 108, 231901(2016).

    [52] K. Makino, K. Kato, Y. Saito, P. Fons, A. V. Kolobov, J. Tominaga, T. Nakano, M. Nakajima. Terahertz spectroscopic characterization of Ge2Sb2Te5 phase change materials for photonics applications. J. Mater. Chem. C, 7, 8209-8215(2019).

    [53] P. Pitchappa, A. Kumar, S. Prakash, H. Jani, T. Venkatesan, R. Singh. Chalcogenide phase change material for active terahertz photonics. Adv. Mater., 31, 1808157(2019).

    [54] P. Pitchappa, A. Kumar, S. Prakash, H. Jani, R. Medwal, M. Mishra, R. S. Rawat, T. Venkatesan, N. Wang, R. Singh. Volatile ultrafast switching at multilevel nonvolatile states of phase change material for active flexible terahertz metadevices. Adv. Funct. Mater., 31, 2100200(2021).

    [55] M. Pinaud, G. Humbert, S. Engelbrecht, L. Merlat, B. M. Fischer, A. Crunteanu. Terahertz devices using the optical activation of GeTe phase change materials: toward fully reconfigurable functionalities. ACS Photon., 8, 3272-3281(2021).

    [56] T. Cao, M. Lian, X. Chen, L. Mao, K. Liu, J. Jia, Y. Su, H. Ren, S. Zhang, Y. Xu, J. Chen, Z. Tian, D. Guo. Multi-cycle reconfigurable THz extraordinary optical transmission using chalcogenide metamaterials. Opto-Electron. Sci., 1, 210010(2021).

    [57] K. Liu, X. Y. Chen, M. Lian, J. Y. Jia, Y. Su, H. N. Ren, S. J. Zhang, Y. H. Xu, J. J. Chen, Z. Tian, T. Cao. Nonvolatile reconfigurable electromagnetically induced transparency with terahertz chalcogenide metasurfaces. Laser Photon. Rev., 16, 2100393(2022).

    [58] X. Chen, S. Zhang, K. Liu, H. Li, Y. Xu, J. Chen, Y. Lu, Q. Wang, X. Feng, K. Wang, Z. Liu, T. Cao, Z. Tian. Reconfigurable and nonvolatile terahertz metadevices based on a phase-change material. ACS Photon., 9, 1638-1646(2022).

    [59] S. Zhang, X. Chen, K. Liu, H. Li, Y. Xu, X. Jiang, Y. Xu, Q. Wang, T. Cao, Z. Tian. Nonvolatile reconfigurable terahertz wave modulator. PhotoniX, 3, 7(2022).

    [60] H. Lu, E. Thelander, J. W. Gerlach, U. Decker, B. Zhu, B. Rauschenbach. Single pulse laser-induced phase transitions of PLD-deposited Ge2Sb2Te5 films. Adv. Funct. Mater., 23, 3621-3627(2013).

    [61] M. N. Julian, C. Williams, S. Borg, S. Bartram, H. J. Kim. Reversible optical tuning of GeSbTe phase-change metasurface spectral filters for mid-wave infrared imaging. Optica, 7, 746-754(2020).

    [62] Q. W. Lin, H. Wong, L. Huitema, A. Crunteanu. Coding metasurfaces with reconfiguration capabilities based on optical activation of phase-change materials for terahertz beam manipulations. Adv. Opt. Mater., 10, 2101699(2021).

    [63] J. Orava, A. L. Greer, B. Gholipour, D. W. Hewak, C. E. Smith. Characterization of supercooled liquid Ge2Sb2Te5 and its crystallization by ultrafast-heating calorimetry. Nat. Mater., 11, 279-283(2012).

    [64] Q. Li, Z. Tian, X. Zhang, R. Singh, L. Du, J. Gu, J. Han, W. Zhang. Active graphene-silicon hybrid diode for terahertz waves. Nat. Commun., 6, 7082(2015).

    [65] A. A. Maradudin, I. Simonsen, J. Polanco, R. M. Fitzgerald. Rayleigh and Wood anomalies in the diffraction of light from a perfectly conducting reflection grating. J. Opt., 18, 024004(2016).

    [66] F. Aieta, P. Genevet, M. A. Kats, N. Yu, R. Blanchard, Z. Gaburro, F. Capasso. Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces. Nano Lett., 12, 4932-4936(2012).

    [67] D. Lin, P. Fan, E. Hasman, M. L. Brongersma. Dielectric gradient metasurface optical elements. Science, 345, 298-302(2014).

    [68] X. Zheng, B. Jia, H. Lin, L. Qiu, D. Li, M. Gu. Highly efficient and ultra-broadband graphene oxide ultrathin lenses with three-dimensional subwavelength focusing. Nat. Commun., 6, 8433(2015).

    [69] Z. Wang, T. Yang, Y. Zhang, Q. Ou, H. Lin, Q. Zhang, H. Chen, H. Y. Hoh, B. Jia, Q. Bao. Flat lenses based on 2D perovskite nanosheets. Adv. Mater., 32, 2001388(2020).

    [70] H. Lin, Z. Q. Xu, G. Cao, Y. Zhang, J. Zhou, Z. Wang, Z. Wan, Z. Liu, K. P. Loh, C. W. Qiu, Q. Bao, B. Jia. Diffraction-limited imaging with monolayer 2D material-based ultrathin flat lenses. Light Sci. Appl., 9, 137(2020).

    [71] F. Qin, B. Liu, L. Zhu, J. Lei, W. Fang, D. Hu, Y. Zhu, W. Ma, B. Wang, T. Shi, Y. Cao, B. O. Guan, C. W. Qiu, Y. Lu, X. Li. π-phase modulated monolayer supercritical lens. Nat. Commun., 12, 32(2021).

    [72] Q. Wang, X. Zhang, Y. Xu, J. Gu, Y. Li, Z. Tian, R. Singh, S. Zhang, J. Han, W. Zhang. Broadband metasurface holograms: toward complete phase and amplitude engineering. Sci. Rep., 6, 32867(2016).

    [73] H. F. Zhang, X. Q. Zhang, Q. Xu, C. X. Tian, Q. Wang, Y. H. Xu, Y. F. Li, J. Q. Gu, Z. Tian, C. M. Ouyang, X. X. Zhang, C. Hu, J. G. Han, W. L. Zhang. High-efficiency dielectric metasurfaces for polarization-dependent terahertz wavefront manipulation. Adv. Opt. Mater., 6, 1700773(2018).

    [74] K. Dong, S. Hong, Y. Deng, H. Ma, J. Li, X. Wang, J. Yeo, L. Wang, S. Lou, K. B. Tom, K. Liu, Z. You, Y. Wei, C. P. Grigoropoulos, J. Yao, J. Wu. A lithography-free and field-programmable photonic metacanvas. Adv. Mater., 30, 1703878(2018).

    [75] A. U. Michel, A. Hessler, S. Meyer, J. Pries, Y. Yu, T. Kalix, M. Lewin, J. Hanss, A. De Rose, T. W. W. Mass, M. Wuttig, D. N. Chigrin, T. Taubner. Advanced optical programming of individual meta-atoms beyond the effective medium approach. Adv. Mater., 31, 1901033(2019).

    [76] Y. F. Hu, X. Liu, M. K. Jin, Y. T. Tang, X. C. Zhang, K. F. Li, Y. Zhao, G. X. Li, J. Zhou. Dielectric metasurface zone plate for the generation of focusing vortex beams. PhotoniX, 2, 10(2021).

    [77] A. Iba, C. W. Domier, M. Ikeda, A. Mase, M. Nakajima, A. V. Pham, N. C. Luhmann. Subdiffraction focusing with a long focal length using a terahertz-wave super-oscillatory lens. Opt. Lett., 46, 4912-4915(2021).

    [78] T. P. Steinbusch, H. K. Tyagi, M. C. Schaafsma, G. Georgiou, J. G. Rivas. Active terahertz beam steering by photo-generated graded index gratings in thin semiconductor films. Opt. Express, 22, 26559-26571(2014).

    Tools

    Get Citation

    Copy Citation Text

    Xieyu Chen, Shoujun Zhang, Kuan Liu, Yuehong Xu, Xiaohan Jiang, Haiyang Li, Xi Feng, Qingwei Wang, Yongchang Lu, Kemeng Wang, Tun Cao, Zhen Tian. Reconfigurable and nonvolatile terahertz lithography-free photonic devices based on phase change films[J]. Photonics Research, 2023, 11(4): 669

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Surface Optics and Plasmonics

    Received: Oct. 13, 2022

    Accepted: Feb. 16, 2023

    Published Online: Apr. 3, 2023

    The Author Email: Zhen Tian (tianzhen@tju.edu.cn)

    DOI:10.1364/PRJ.478103

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology