High Power Laser and Particle Beams, Volume. 36, Issue 12, 122003(2024)
Fabrication technology of Al/Ta-Nb alloy impedance matching target
Figures & Tables(7)
Fig. 1. Schematic configuration of Al/Ta-Nb alloy impedance matching target
Fig. 2. Experimental setup and device of femtosecond laser ablation
Fig. 3. Microscopic image of Al/Ta-Nb alloy impedance match target
Fig. 6. White light interferometer image of Al/Ta-Nb alloy impedance matching target
Table 1. Comparison of required and measured values of Al/Ta-Nb impedance matching target
View tableView in ArticleTable 1. Comparison of required and measured values of Al/Ta-Nb impedance matching target
thickness of Al step/μm thickness of Ta-Nb step/μm gap width/μm Rq of Al/nm Rq of Ta-Nb/nm required value 20±1 13±2 ＜120 ＜50 ＜50 measured value 20.00 13.00 90.10 33.83 48.65
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Zhiyong Xie, Junjian Ye, Guo Jia, Zhiheng Fang, Zhiyu He, Hua Shu, Yuchun Tu, Xiuguang Huang, Sizu Fu. Fabrication technology of Al/Ta-Nb alloy impedance matching target[J]. High Power Laser and Particle Beams, 2024, 36(12): 122003
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Received: Jan. 19, 2024
Accepted: Sep. 29, 2024
Published Online: Jan. 15, 2025
The Author Email: Ye Junjian (18334741@qq.com)
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