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Chinese Journal of Quantum Electronics, Volume. 31, Issue 2, 1(2014)

[in Chinese]

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CLP Journals

[1] Wang Jun, Jin Chunshui, Wang Liping, Guo Benyin, Yu Bo. Foundation and Application of Model for Multilayers Analysis in Extreme Ultra-Violet Lithography Projection[J]. Acta Optica Sinica, 2014, 34(8): 811002

[2] Zhang Chao, Zhang Jierui, Wang Yiming, Kuang Shangqi, Xie Yao. Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm[J]. Acta Optica Sinica, 2017, 37(6): 631001

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Published Online: Mar. 31, 2014

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Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology