Optics and Precision Engineering, Volume. 15, Issue 4, 447(2007)
Study on dimensional precision of UV-lithography on SU-8 photoresist
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[9] [9] LAWES R A.Manufacturing tolerances for UV-LIGA using SU-8 resist[J].J.Micromech.Microeng.,2005,15 (11):2198-2203.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on dimensional precision of UV-lithography on SU-8 photoresist[J]. Optics and Precision Engineering, 2007, 15(4): 447