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Optics and Precision Engineering, Volume. 15, Issue 4, 447(2007)

Study on dimensional precision of UV-lithography on SU-8 photoresist

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on dimensional precision of UV-lithography on SU-8 photoresist[J]. Optics and Precision Engineering, 2007, 15(4): 447

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    Received: May. 20, 2006

    Accepted: --

    Published Online: Feb. 18, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology