Optics and Precision Engineering, Volume. 15, Issue 7, 1077(2007)

A high speed and highprecision displacement measurement method using double grating scales

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A high speed and highprecision displacement measurement method using double grating scales[J]. Optics and Precision Engineering, 2007, 15(7): 1077

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    Paper Information

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    Received: Sep. 15, 2006

    Accepted: --

    Published Online: Feb. 18, 2008

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