Optics and Precision Engineering, Volume. 15, Issue 7, 1077(2007)
A high speed and highprecision displacement measurement method using double grating scales
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A high speed and highprecision displacement measurement method using double grating scales[J]. Optics and Precision Engineering, 2007, 15(7): 1077