Acta Optica Sinica, Volume. 33, Issue 1, 122004(2013)
Optical Design of Hyper Numerical-Aperture Schwarzschild Projection Lithographic Lens
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Hu Dawei, Li Yanqiu, Liu Xiaolin. Optical Design of Hyper Numerical-Aperture Schwarzschild Projection Lithographic Lens[J]. Acta Optica Sinica, 2013, 33(1): 122004
Category: Optical Design and Fabrication
Received: Jul. 19, 2012
Accepted: --
Published Online: Nov. 22, 2012
The Author Email: Dawei Hu (hudawei_bit@163.com)