Optics and Precision Engineering, Volume. 11, Issue 4, 368(2003)

[in Chinese]

[in Chinese] and [in Chinese]
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    References(7)

    [5] [5] LUTZ W G, MEYERS G F. Applications of atomic force microscopy in optical disc technology[EB/OL].http://www.veeco.com/appnotes/AN18_CD DVD.pdf.

    [6] [6] FRANKY K L Fan, YEUNG Dr S M S, WILLIAM M C Ng. Cloud elimination in DVD production[J]. Tape Disc Business,1998,28(9):25-32.

    [7] [7] FRANKY K L Fan. Towards shorter replication cycle time[J]. Tape Disc Business, 1997,27(2):20-26.

    [8] [8] Molecular device and tools for nanotechnology. SPM Analysis of the CD/DVD Discs[EB/OL]. http://www.ntmdt.ru/Application-Notes/Science_Technology_Applications/Data_storage/SPM_analysis_of_the_CDDVD_discs/text24.html

    [9] [9] CHERNOFF D A, BURKHEAD D L. Automated, high precision measurement of critical dimensions using the atomic force microscopy[J]. J Vac Sci Technol,1999,A17:1457-1462.

    [10] [10] CHERNOFF D A, BURKHEAD D L. AFM length analysis of data marks: measuring jitter, asymmetry, process noise and process position[J]. SPIE,2001,4342:13-22.

    [11] [11] COOK C S, CHERNOFF D A, BURKHEAD D L. Automated analysis of data mark microstructure of various media in the optical disc industry[J]. SPIE,2000,4090:16-25.

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    Paper Information

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    Received: Jan. 16, 2003

    Accepted: --

    Published Online: Nov. 3, 2006

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