[5] [5] Patelli A, Ravagnan J, Rigato V, et al.Applied Surface Science, 2004, 238(7): 262.

[6] [6] Windt D L, Donguy S, Seely J, et al.Proc.of SPIE, 2004, 5168(1): 1.

[7] [7] Spiller Eberhard.SPIE-The International Society for optical Engineering, 1994, 145： 199.

[8] [8] Soufli Regina, Windt David L, Robinson Jeff C, et al.Proc.of SPIE, 2005, 5901(0277): M-1.

[9] [9] Voorma H J, Louis E, Koster N B, et al.J.Appl.Phys., 1997, 81(9): 6112.

[10] [10] Maury H, Jonnard P, André J M, et al.Thin Solid Films, 2006, 514: 278.

[13] [13] Steams D G, Gaines D P, Sweeney D W, et al.J.Appl.Phys., 1998, 84(2): 1003.

[14] [14] Spiller E, Rosenbluth A E.Opt.Eng., 1986, 25: 954.

[15] [15] Spiller E.Revue Phys.Appl., 1988, 23: 1687.

[16] [16] Slaughter J M, Schulze Dean W, Hills C R, et al.J.Appl.Phys., 1994, 76(4): 2144.