Chinese Journal of Quantum Electronics, Volume. 22, Issue 6, 840(2005)
Nano-photolithography using super-resolution near-field structure
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Nano-photolithography using super-resolution near-field structure[J]. Chinese Journal of Quantum Electronics, 2005, 22(6): 840
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