Preparation of Al<sub>2</sub>O<sub>3</sub> Dielectric Layers at Room Temperature Based on Flexible Displays

Yao Rihui; Zheng Zeke; Zeng Yong; Hu Shiben; Liu Xianzhe; Tao Ruiqiang; Chen Jianqiu; Cai Wei; Ning Honglong; Xu Miao; Wang Lei; Lan Linfeng; Peng Junbiao

doi:10.3788/aos201737.0331001

Acta Optica Sinica, Volume. 37, Issue 3, 331001(2017)

Preparation of Al₂O₃ Dielectric Layers at Room Temperature Based on Flexible Displays

Yao Rihui^*, Zheng Zeke, Zeng Yong, Hu Shiben, Liu Xianzhe, Tao Ruiqiang, Chen Jianqiu, Cai Wei, Ning Honglong, Xu Miao, Wang Lei, Lan Linfeng, and Peng Junbiao

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Yao Rihui, Zheng Zeke, Zeng Yong, Hu Shiben, Liu Xianzhe, Tao Ruiqiang, Chen Jianqiu, Cai Wei, Ning Honglong, Xu Miao, Wang Lei, Lan Linfeng, Peng Junbiao. Preparation of Al₂O₃ Dielectric Layers at Room Temperature Based on Flexible Displays[J]. Acta Optica Sinica, 2017, 37(3): 331001

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Paper Information

Category: Thin Films

Received: Sep. 14, 2016

Accepted: --

Published Online: Mar. 8, 2017

The Author Email: Rihui Yao (yaorihui@scut.edu.cn)

DOI:10.3788/aos201737.0331001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology