Optics and Precision Engineering, Volume. 22, Issue 10, 2639(2014)

Evaluation of wavefront diffracted from ultra small aperture

SHAO Jing1...2,*, MA Dong-mei1, ZHANG Hai-tao1, YU Jie1 and ZHOU Feng1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(12)

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    [5] [5] TOSHIAKI M, SATORU O, TAKAAKI N, et al.. Measurement accuracy in phase-shifting point diffraction interferometer with two optical fibers[J]. Optical Review, 2007, 14(6): 401-405.

    [6] [6] LU Z X, JIN CH SH, MA D M, et al..Analysis of effect of tiny pinhole deviation on far-field wave-front quality[J].Acta Optica Sinica,2011,31(8):0812002.(in Chinese)

    [8] [8] ZHANG Y, JIN CH SH, MA D M, et al..Study of calibrating algorithm for wavefront reference source of point diffraction interferometer[J].Chinese Journal of Lasers, 2012, 39(3):0308001.(in Chinese)

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    [11] [11] SHAO J , MA D M.Testing the criterion wavefront diffracted by point diffraction interferometer[J].Chinese Journal of Lasers,2011,38(5):0508003.(in Chinese)

    [12] [12] DIRKSENA P, BRAATB J, JANSSEN A J E M, et al.. Aberration retrieval using the extended Nijboer-Zernike approach[J]. Journal of Microlithography, Microfabrication and Microsystems, 2003, 2(1): 61-68.

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    SHAO Jing, MA Dong-mei, ZHANG Hai-tao, YU Jie, ZHOU Feng. Evaluation of wavefront diffracted from ultra small aperture[J]. Optics and Precision Engineering, 2014, 22(10): 2639

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    Paper Information

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    Received: Jun. 13, 2013

    Accepted: --

    Published Online: Nov. 6, 2014

    The Author Email: Jing SHAO (qunying12@163.com)

    DOI:10.3788/ope.20142210.2639

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