Laser & Optoelectronics Progress, Volume. 57, Issue 11, 111404(2020)
Control of Subwavelength Periodic Surface Structure Formation with Femtosecond Laser Pulses
[1] Birnbaum M. Semiconductor surface damage produced by ruby lasers[J]. Journal of Applied Physics, 36, 3688-3689(1965).
[2] Emmony D C, Howson R P, Willis L J. Laser mirror damage in germanium at 10.6 μm[J]. Applied Physics Letters, 23, 598-600(1973).
[3] Keilmann F, Bai Y H. Periodic surface structures frozen into CO2 laser-melted quartz[J]. Applied Physics A Solids and Surfaces, 29, 9-18(1982).
[4] Sipe J E, Young J F, Preston J S et al. Laser-induced periodic surface structure. I. Theory[J]. Physical Review B, 27, 1141-1154(1983).
[5] Zhou G S, Fauchet P M, Siegman A E. Growth of spontaneous periodic surface structures on solids during laser illumination[J]. Physical Review B, 26, 5366-5381(1982).
[6] van Driel H M, Sipe J E, Young J F. Laser-induced periodic surface structure on solids: a universal phenomenon[J]. Physical Review Letters, 49, 1955-1958(1982).
[7] Young J F. Preston J S,van Driel H M, et al. Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass[J]. Physical Review B, 27, 1155-1172(1983).
[8] Young J F. Sipe J E, van Driel H M. Laser-induced periodic surface structure. III. Fluence regimes, the role of feedback, and details of the induced topography in germanium[J]. Physical Review B, 30, 2001-2015(1984).
[9] Seminogov V N. Interaction of powerful laser radiation with the surfaces of semiconductors and metals: nonlinear optical effects and nonlinear optical diagnostics[J]. Soviet Physics Uspekhi, 28, 1084-1124(1985).
[10] Ozkan A M, Malshe A P, Railkar T A et al. Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters[J]. Applied Physics Letters, 75, 3716-3718(1999).
[11] Borowiec A, Haugen H K. Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses[J]. Applied Physics Letters, 82, 4462-4464(2003).
[12] Yang J J, Wang R, Liu W et al. Investigation of microstructuring CuInGaSe2 thin films with ultrashort laser pulses[J]. Journal of Physics D: Applied Physics, 42, 215305(2009).
[13] Xue L, Yang J J. Yang, et al. Creation of periodic subwavelength ripples on tungsten surface by ultra-short laser pulses[J]. Applied Physics A, 109, 357-365(2012).
[15] Wang L, Chen Q D, Cao X W et al. Plasmonic nano-printing: large-area nanoscale energy deposition for efficient surface texturing[J]. Light: Science & Applications, 6, e17112(2017).
[16] Bonse J, Krüger J, Höhm S et al. Femtosecond laser-induced periodic surface structures[J]. Journal of Laser Applications, 24, 042006(2012).
[17] Bonse J, Munz M, Sturm H. Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses[J]. Journal of Applied Physics, 97, 013538(2005).
[18] Huang M, Zhao F L, Cheng Y et al. The morphological and optical characteristics of femtosecond laser-induced large-area micro/nanostructures on GaAs, Si, and brass[J]. Optics Express, 18, A600-A619(2010).
[19] Hou S S, Huo Y Y, Xiong P X et al. Formation of long- and short-periodic nanoripples on stainless steel irradiated by femtosecond laser pulses[J]. Journal of Physics D: Applied Physics, 44, 505401(2011).
[20] Qi L T, Nishii K, Namba Y. Regular subwavelength surface structures induced by femtosecond laser pulses on stainless steel[J]. Optics Letters, 34, 1846-1848(2009).
[21] Han Y H, Zhao X L, Qu S L. Polarization dependent ripples induced by femtosecond laser on dense flint (ZF6) glass[J]. Optics Express, 19, 19150-19155(2011).
[22] Höhm S, Rosenfeld A, Krüger J et al. Femtosecond laser-induced periodic surface structures on silica[J]. Journal of Applied Physics, 112, 014901(2012).
[23] Bonse J, Sturm H, Schmidt D et al. Chemical, morphological and accumulation phenomena in ultrashort-pulse laser ablation of TiN in air[J]. Applied Physics A Materials Science & Processing, 71, 657-665(2000).
[24] Bonse J, Höhm S, Rosenfeld A et al. Sub-100-nm laser-induced periodic surface structures upon irradiation of titanium by Ti: sapphire femtosecond laser pulses in air[J]. Applied Physics A, 110, 547-551(2013).
[25] Jia T Q, Zhao F L, Huang M et al. Alignment of nanoparticles formed on the surface of 6H-SiC crystals irradiated by two collinear femtosecond laser beams[J]. Applied Physics Letters, 88, 111117(2006).
[28] Hsu E M. Crawford T H R,Tiedje H F, et al. Periodic surface structures on gallium phosphide after irradiation with 150 fs-7 ns laser pulses at 800 nm[J]. Applied Physics Letters, 91, 111102(2007).
[29] Bonse J, Munz M, Sturm H. Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses[J]. Journal of Applied Physics, 97, 013538(2005).
[30] Yang Y, Yang J, Xue L et al. Surface patterning on periodicity of femtosecond laser-induced ripples[J]. Applied Physics Letters, 97, 141101(2010).
[31] Bonse J, Krüger J. Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon[J]. Journal of Applied Physics, 108, 034903(2010).
[32] Sakabe S, Hashida M, Tokita S et al. Mechanism for self-formation of periodic grating structures on a metal surface by a femtosecond laser pulse[J]. Physical Review B, 79, 033409(2009).
[33] Okamuro K, Hashida M, Miyasaka Y et al. Laser fluence dependence of periodic grating structures formed on metal surfaces under femtosecond laser pulse irradiation[J]. Physical Review B, 82, 165417(2010).
[34] Shimotsuma Y, Kazansky P G, Qiu J R et al. Self-organized nanogratings in glass irradiated by ultrashort light pulses[J]. Physical Review Letters, 91, 247405(2003).
[36] Shen M Y, Carey J E, Crouch C H et al. High-density regular arrays of nanometer-scale rods formed on silicon surfaces via femtosecond laser irradiation in water[J]. Nano Letters, 8, 2087-2091(2008).
[40] J J Nivas J, He S T, Rubano A et al. Direct femtosecond laser surface structuring with optical vortex beams generated by a Q-plate[J]. Scientific Reports, 5, 17929(2015).
[41] Ouyang J, Perrie W, Allegre O J et al. Tailored optical vector fields for ultrashort-pulse laser induced complex surface plasmon structuring[J]. Optics Express, 23, 12562-12572(2015).
[42] Bonse J, Rosenfeld A, Krüger J. On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses[J]. Journal of Applied Physics, 106, 104910(2009).
[43] Huang M, Zhao F L, Cheng Y et al. Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser[J]. ACS Nano, 3, 4062-4070(2009).
[44] Miyaji G, Miyazaki K. Origin of periodicity innanostructuring on thin film surfaces ablated with femtosecond laser pulses[J]. Optics Express, 16, 16265-16271(2008).
[45] Garrelie F, Colombier J P, Pigeon F et al. Evidence of surface plasmon resonance in ultrafast laser-induced ripples[J]. Optics Express, 19, 9035(2011).
[47] Reif J, Varlamova O, Costache F. Femtosecond laser induced nanostructure formation: self-organization control parameters[J]. Applied Physics A, 92, 1019-1024(2008).
[48] Wu X J, Jia T Q, Zhao F L et al. Formation mechanisms of uniform arrays of periodic nanoparticles and nanoripples on 6H-SiC crystal surface induced by femtosecond laser ablation[J]. Applied Physics A, 86, 491-495(2007).
[49] Dufft D, Rosenfeld A, Das S K et al. Femtosecond laser-induced periodic surface structures revisited: a comparative study on ZnO[J]. Journal of Applied Physics, 105, 034908(2009).
[50] Sedao X, Shugaev M V, Wu C P et al. Growth twinning and generation of high-frequency surface nanostructures in ultrafast laser-induced transient melting and resolidification[J]. ACS Nano, 10, 6995-7007(2016).
[51] Volkov S N, Kaplan A E, Miyazaki K. Evanescent field at nanocorrugated dielectric surface[J]. Applied Physics Letters, 94, 041104(2009).
[53] Straub M, Afshar M, Feili D et al. Surface plasmon polariton model of high-spatial frequency laser-induced periodic surface structure generation in silicon[J]. Journal of Applied Physics, 111, 124315(2012).
[54] Bonse J, Hohm S, Kirner S V et al. Laser-induced periodic surface structures: a scientific evergreen[J]. IEEE Journal of Selected Topics in Quantum Electronics, 23, 9000615(2017).
[55] Höhm S, Rosenfeld A, Krüger J et al. Femtosecond diffraction dynamics of laser-induced periodic surface structures on fused silica[J]. Applied Physics Letters, 102, 054102(2013).
[56] Jia X, Jia T Q, Peng N N et al. Dynamics of femtosecond laser-induced periodic surface structures on silicon by high spatial and temporal resolution imaging[J]. Journal of Applied Physics, 115, 143102(2014).
[57] Kafka K R P, Austin D R, Li H et al. Time-resolved measurement of single pulse femtosecond laser-induced periodic surface structure formation induced by a pre-fabricated surface groove[J]. Optics Express, 23, 19432-19441(2015).
[58] Cheng K, Liu J, Cao K et al. Ultrafast dynamics of single-pulse femtosecond laser-induced periodic ripples on the surface of a gold film[J]. Physical Review B, 98, 184106(2018).
[59] Höhm S, Herzlieb M, Rosenfeld A et al. Dynamics of the formation of laser-induced periodic surface structures (LIPSS) upon femtosecond two-color double-pulse irradiation of metals, semiconductors, and dielectrics[J]. Applied Surface Science, 374, 331-338(2016).
[60] Höhm S, Rohloff M, Rosenfeld A et al. Dynamics of the formation of laser-induced periodic surface structures on dielectrics and semiconductors upon femtosecond laser pulse irradiation sequences[J]. Applied Physics A, 110, 553-557(2013).
[62] Jiang L, Wang A D, Li B et al. Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application[J]. Light: Science & Applications, 7, 17134(2018).
[63] Gedvilas M, Mikšys J. Ra cˇiukaitis G. Flexible periodical micro- and nano-structuring of a stainless steel surface using dual-wavelength double-pulse picosecond laser irradiation[J]. RSC Advances, 5, 75075-75080(2015).
[65] Dusser B, Sagan Z, Soder H et al. Controlled nanostructrures formation by ultra fast laser pulses for color marking[J]. Optics Express, 18, 2913-2924(2010).
[67] Zorba V, Persano L, Pisignano D et al. Making silicon hydrophobic: wettability control by two-lengthscale simultaneous patterning with femtosecond laser irradiation[J]. Nanotechnology, 17, 3234-3238(2006).
[68] Zorba V, Stratakis E, Barberoglou M et al. Biomimetic artificial surfaces quantitatively reproduce the water repellency of a lotus leaf[J]. Advanced Materials, 20, 4049-4054(2008).
[70] Blossey R. Self-cleaning surfaces: virtual realities[J]. Nature Materials, 2, 301-306(2003).
[72] Volkov R V, Golishnikov D M, Gordienko V M et al. Overheated plasma at the surface of a target with a periodic structure induced by femtosecond laser radiation[J]. Journal of Experimental and Theoretical Physics Letters, 77, 473-476(2003).
[73] Karabutov A V, Frolov V D, Loubnin E N et al. Low-threshold field electron emission of Si micro-tip arrays produced by laser ablation[J]. Applied Physics A: Materials Science & Processing, 76, 413-416(2003).
[74] Zorba V, Tzanetakis P, Fotakis C et al. Silicon electron emitters fabricated by ultraviolet laser pulses[J]. Applied Physics Letters, 88, 081103(2006).
[75] Diebold E D, Mack N H, Doorn S K et al. Femtosecond laser-nanostructured substrates for surface-enhanced Raman scattering[J]. Langmuir, 25, 1790-1794(2009).
[76] Buividas R, Fahim N. Juodkazyt e· J, et al. Novel method to determine the actual surface area of a laser-nanotextured sensor[J]. Applied Physics A, 114, 169-175(2014).
[77] Messaoudi H, Kumar Das S, Lange J et al[M]. Femtosecond-laser induced periodic surface structures for surface enhanced Raman spectroscopy of biomolecules, 207-219(2014).
[78] Born M, Wolf E, Hecht E. Principles of optics: electromagnetic theory of propagation, interference and diffraction oflight[J]. Physics Today, 53, 77-78(2000).
[80] Beresna M. Gecevi cˇius M, Kazansky P G, et al. Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass[J]. Applied Physics Letters, 98, 201101(2011).
[81] Richter S, Heinrich M, Döring S et al. Nanogratings in fused silica: Formation, control, and applications[J]. Journal of Laser Applications, 24, 042008(2012).
[83] Yang Yang J J, Liang C Y et al. Surface microstructuring of Ti plates by femtosecond lasers in liquid ambiences: a new approach to improving biocompatibility[J]. Optics Express, 17, 21124-21133(2009).
[84] Bush J R, Nayak B K, Nair L S et al. Improved bio-implant using ultrafast laser induced self-assembled nanotexture in titanium[J]. Journal of Biomedical Materials Research Part B: Applied Biomaterials, 97B, 299-305(2011).
[85] Cunha A, Elie A M, Plawinski L et al. Femtosecond laser surface texturing of titanium as a method to reduce the adhesion of Staphylococcus aureus and biofilm formation[J]. Applied Surface Science, 360, 485-493(2016).
[86] Shinonaga T, Tsukamoto M, Kawa T et al. Formation of periodic nanostructures using a femtosecond laser to control cell spreading on titanium[J]. Applied Physics B, 119, 493-496(2015).
[87] Pan R, Zhong M L. Fabrication of superwetting surfaces by ultrafast lasers and mechanical durability of superhydrophobic surfaces[J]. Chinese Science Bulletin, 64, 1268-1289(2019).
[88] Li X, Feng D H, Jia T Q et al. Fabrication of a two-dimensional periodic microflower array by three interfered femtosecond laser pulses on Al: ZnO thin films[J]. New Journal of Physics, 12, 043025(2010).
[91] Gnilitskyi I. Derrien ThibaultJ Y, Levy Y, et al. High-speed manufacturing of highly regular femtosecond laser-induced periodic surface structures: physical origin of regularity[J]. Scientific Reports, 7, 8485(2017).
[92] Wang F, Zhao B, Lei Y H et al. Producing anomalous uniform periodic nanostructures on Cr thin films by femtosecond laser irradiation in vacuum[J]. Optics Letters, 45, 1301(2020).
[93] Wang R P. Investigation of controllablefabricating periodicnanostructures on the metal surface by dual-color femtosecond laser pulses[D]. Tianjin: Nankai University, 28-35(2016).
[94] Hashida M, Nishii T, Miyasaka Y et al. Orientation of periodic grating structures controlled by double-pulse irradiation[J]. Applied Physics A, 122, 484(2016).
[95] Zhao B. Light-induced microscopic coherent oscillations and their physical influences on metal surfaces[D]. Tianjin: Nankai University, 76-90(2015).
[96] He W L, Yang J J. Formation of slantwise orientated nanoscale ripple structures on a single-crystal 4H-SiC surface by time-delayed double femtosecond laser pulses[J]. Applied Physics A, 123, 518(2017).
[97] He W L, Yang J J. Probing ultrafast nonequilibrium dynamics in single-crystal SiC through surface nanostructures induced by femtosecond laser pulses[J]. Journal of Applied Physics, 121, 123108(2017).
[98] He W L, Yang J J, Guo C L. Controlling periodic ripple microstructure formation on 4H-SiC crystal with three time-delayed femtosecond laser beams of different linear polarizations[J]. Optics Express, 25, 5156-5168(2017).
[99] Qiao H Z. Investigation of femtosecond laser-induced two-dimensional metallic array submicron structures[D]. Tianjin: Nankai University, 32-66(2016).
[100] Qiao H Z, Yang J J, Wang F et al. Femtosecond laser direct writing of large-area two-dimensional metallic photonic crystal structures on tungsten surfaces[J]. Optics Express, 23, 26617-26627(2015).
[101] Qiao H Z, Yang J J, Li J et al. Formation of subwavelength periodic triangular arrays on tungsten through double-pulsed femtosecond laser irradiation[J]. Materials, 11, 2380(2018).
[102] Cong J, Yang J J, Zhao B et al. Fabricating subwavelength dot-matrix surface structures of molybdenum by transient correlated actions of two-color femtosecond laser beams[J]. Optics Express, 23, 5357-5367(2015).
[103] Qin W W, Yang J J. Controlled assembly of high-order nanoarray metal structures on bulk copper surface by femtosecond laser pulses[J]. Surface Science, 661, 28-33(2017).
Get Citation
Copy Citation Text
Bo Zhao, Xin Zheng, Tingting Zou, Hongbo Xie, Wei Xin, Jianjun Yang, Chunlei Guo. Control of Subwavelength Periodic Surface Structure Formation with Femtosecond Laser Pulses[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111404
Category: Lasers and Laser Optics
Received: Mar. 2, 2020
Accepted: Apr. 10, 2020
Published Online: Jun. 2, 2020
The Author Email: Yang Jianjun (jjyang@ciomp.ac.cn)