Optics and Precision Engineering, Volume. 26, Issue 3, 588(2018)
Trajectory-fitting and testing error analysis of stage for curved grating etching
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SHEN Chen, TAN Xin, ZHU Ji-wei, ZHANG Wei, QI Xiang-dong. Trajectory-fitting and testing error analysis of stage for curved grating etching[J]. Optics and Precision Engineering, 2018, 26(3): 588
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Received: Sep. 13, 2017
Accepted: --
Published Online: Apr. 25, 2018
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