Optics and Precision Engineering, Volume. 31, Issue 15, 2248(2023)

Rapid fabrication of patterned Cu micro-nano structure by laser ablation in liquid

Miaomiao YU1, Zhankun WENG1,2、*, Guanqun WANG1, Chuanchuan GUO1, Junting HU1, and Zuobin WANG1
Author Affiliations
  • 1International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun30022, China
  • 2School of Mechatronic Engineering and Automation, Foshan University, Foshan585, China
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    Figures & Tables(12)
    Schematic diagram of patterned Cu micro-nano structure prepared by laser ablation
    SEM images of Cu micro-nano structure prepared at scanning speed of 100 mm/s with different laser powers(Illustration is Fast Fourier Transform spectrum)
    SEM images of Cu micro-nano structure prepared at laser power of 2 W with different scanning speeds (Illustration is a Fast Fourier Transform spectrum)
    SEM images of Cu micro-nano structure prepared with different scanning times at laser power of 2 W and scanning speed of 50 mm/s(illustration is Fast Fourier Transform spectrum)
    EDS and element mapping images of Cu micro-nano structure prepared by scanning 4 times
    XRD spectra of patterned Cu micro-nano structure
    Evolution of patterned Cu micro-nano structure by laser ablation in liquid
    Schematic of droplets on superhydrophobic surfaces with low adhesion (Cassie-Baxter state) and high adhesion (Cassie-impregnating state)
    Water contact angle and oil contact angle of patterned Cu micro-nano structure with different scanning times
    Shape of droplets when patterned Cu micro-nano structure were vertical and inverted
    • Table 1. Effect of scanning times on particle size in center of laser spot

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      Table 1. Effect of scanning times on particle size in center of laser spot

      扫描次数粒径占比/%
      <200 nm200~500 nm>500 nm
      197.32.40.3
      294.84.01.2
      392.95.81.3
      491.27.71.1
      589.97.92.2
      687.08.84.2
      786.89.83.4
      884.011.94.1
      982.113.34.6
      1076.418.25.4
    • Table 2. Effect of roughness of patterned Cu micro-nano structure on different scanning times

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      Table 2. Effect of roughness of patterned Cu micro-nano structure on different scanning times

      扫描次数Ra标准偏差
      10.20.01
      20.40.02
      30.50.01
      40.80.03
      50.90.03
      61.30.11
      71.50.04
      81.20.03
      91.00.06
      100.70.09
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    Miaomiao YU, Zhankun WENG, Guanqun WANG, Chuanchuan GUO, Junting HU, Zuobin WANG. Rapid fabrication of patterned Cu micro-nano structure by laser ablation in liquid[J]. Optics and Precision Engineering, 2023, 31(15): 2248

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: May. 26, 2023

    Accepted: --

    Published Online: Sep. 5, 2023

    The Author Email: WENG Zhankun (wengzk@fosu.edu.cn)

    DOI:10.37188/OPE.20233115.2248

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