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Infrared and Laser Engineering, Volume. 53, Issue 10, 20240285(2024)

Experimental study of nanosecond laser ablation mechanism and polishing of CVD diamond (inner cover paper·invited)

Quanli ZHANG1, Boxin XU1, Jiahao LI1, Jian LIU1, Mingtao WU2、*, and Yucan FU1
Author Affiliations
  • 1College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
  • 2Sichuan Precision and Ultra-Precision Machining Engineering Technology Center, Chengdu 610200, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (19)
    Equations (3)
    References (18)
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    Figures & Tables(19)
    Distribution of laser energy density along the spot radius (φ0=3 000 J/cm2)

    Fig. 1. Distribution of laser energy density along the spot radius (φ0=3 000 J/cm2)

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    Finite element simulation meshing diagram

    Fig. 2. Finite element simulation meshing diagram

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    Temperature field distribution of CVD diamond surface laser ablation simulation

    Fig. 3. Temperature field distribution of CVD diamond surface laser ablation simulation

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    Simulation results for different laser incidence angles. (a) Tilt angle=10°; (b) Tilt angle=30°; (c) Tilt angle=50°; (d) Tilt angle=60°

    Fig. 4. Simulation results for different laser incidence angles. (a) Tilt angle=10°; (b) Tilt angle=30°; (c) Tilt angle=50°; (d) Tilt angle=60°

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    Original surface morphology of CVD diamond. (a) Scanning electron microscopy image; (b) Three-dimensional topography

    Fig. 5. Original surface morphology of CVD diamond. (a) Scanning electron microscopy image; (b) Three-dimensional topography

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    Effect of incident angle on surface roughness of CVD diamond at different laser powers

    Fig. 6. Effect of incident angle on surface roughness of CVD diamond at different laser powers

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    Three-dimensional topography of laser ablated CVD diamond surface at different incidence angles with laser power 40 W. (a) Laser incidence angle=10°; (b) Laser incidence angle=30°; (c) Laser incidence angle=50°; (d) Laser incidence angle=60°

    Fig. 7. Three-dimensional topography of laser ablated CVD diamond surface at different incidence angles with laser power 40 W. (a) Laser incidence angle=10°; (b) Laser incidence angle=30°; (c) Laser incidence angle=50°; (d) Laser incidence angle=60°

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    Three-dimensional topography of CVD diamond surface ablated by laser at 60° laser incidence angle with different power. (a) Laser power=20 W; (b) Laser power=30 W; (c) Laser power=40 W; (d) Laser power=50 W

    Fig. 8. Three-dimensional topography of CVD diamond surface ablated by laser at 60° laser incidence angle with different power. (a) Laser power=20 W; (b) Laser power=30 W; (c) Laser power=40 W; (d) Laser power=50 W

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    Surface morphology of laser ablated CVD diamond at different incidence angles with laser power of 40 W. (a) Laser incidence angle=10°; (b) Laser incidence angle=30°; (c) Laser incidence angle=50°; (d) Laser incidence angle=60°

    Fig. 9. Surface morphology of laser ablated CVD diamond at different incidence angles with laser power of 40 W. (a) Laser incidence angle=10°; (b) Laser incidence angle=30°; (c) Laser incidence angle=50°; (d) Laser incidence angle=60°

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    Surface morphology of CVD diamond at 60° laser incidence angle. (a) Laser power=20 W; (b) Laser power=30 W; (c) Laser power=40 W; (d) Laser power=50 W

    Fig. 10. Surface morphology of CVD diamond at 60° laser incidence angle. (a) Laser power=20 W; (b) Laser power=30 W; (c) Laser power=40 W; (d) Laser power=50 W

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    Effect of laser scanning speed on surface roughness of CVD diamond

    Fig. 11. Effect of laser scanning speed on surface roughness of CVD diamond

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    Three-dimensional topography of CVD diamond under different laser scanning speeds. (a) Scanning speed=200 mm/s; (b) Scanning speed=250 mm/s; (c) Scanning speed=100 mm/s; (d) Scanning speed=300 mm/s

    Fig. 12. Three-dimensional topography of CVD diamond under different laser scanning speeds. (a) Scanning speed=200 mm/s; (b) Scanning speed=250 mm/s; (c) Scanning speed=100 mm/s; (d) Scanning speed=300 mm/s

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    Surface morphology of CVD diamond at different laser scanning speeds. (a) Scanning speed=200 mm/s; (b) Scanning speed=250 mm/s; (c) Scanning speed=100 mm/s; (d) Scanning speed=300 mm/s

    Fig. 13. Surface morphology of CVD diamond at different laser scanning speeds. (a) Scanning speed=200 mm/s; (b) Scanning speed=250 mm/s; (c) Scanning speed=100 mm/s; (d) Scanning speed=300 mm/s

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    Effect of the number of laser scans on the surface roughness of CVD diamonds

    Fig. 14. Effect of the number of laser scans on the surface roughness of CVD diamonds

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    Three-dimensional topography of CVD diamond under different laser scanning times. (a) Scanning times=5; (b) Scanning times=15; (c) Scanning times=20; (d) Scanning times=25

    Fig. 15. Three-dimensional topography of CVD diamond under different laser scanning times. (a) Scanning times=5; (b) Scanning times=15; (c) Scanning times=20; (d) Scanning times=25

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    Surface morphology of CVD diamond under different laser processing times. (a) Scanning times=5; (b) Scanning times=15; (c) Scanning times=20; (d) Scanning times=25

    Fig. 16. Surface morphology of CVD diamond under different laser processing times. (a) Scanning times=5; (b) Scanning times=15; (c) Scanning times=20; (d) Scanning times=25

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    • Table 1. CVD diamond and graphite material properties

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      Table 1. CVD diamond and graphite material properties

      Material propertiesCVD diamondGraphite
      Density/kg·m−335152090-2330
      Specific heat capacity/J·(kg·K)−118272248
      Thermal conductivity/W·(m·K)−12000151
      Oxidation temperature/K993-1073873-973
      Coefficient of thermal expansion/K−11.1×10−64.5×10−6

    • Table 2. Infrared nanosecond laser main performance parameters

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      Table 2. Infrared nanosecond laser main performance parameters

      Technical parameterValue
      Maximum average power P/W50
      Wavelength λ/nm1064
      Pulse width tp/ns120
      Pulse repetition rate f/kHz20-5000
      Spot diameter d/μm40

    • Table 3. Laser processing test parameters

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      Table 3. Laser processing test parameters

      NumberTilt/(°)Power/WScanning speed/mm·s−1Scanning frequency/kHzProcessing times, N
      1020/30/40/5020010010
      21020/30/40/5020010010
      32020/30/40/5020010010
      43020/30/40/5020010010
      54020/30/40/5020010010
      65020/30/40/5020010010
      76020/30/40/5020010010
      86040100/150/200/250/30010010
      960402001005/10/15/20/25
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    Quanli ZHANG, Boxin XU, Jiahao LI, Jian LIU, Mingtao WU, Yucan FU. Experimental study of nanosecond laser ablation mechanism and polishing of CVD diamond (inner cover paper·invited)[J]. Infrared and Laser Engineering, 2024, 53(10): 20240285

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    Paper Information

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    Received: Jul. 1, 2024

    Accepted: --

    Published Online: Dec. 13, 2024

    The Author Email: WU Mingtao (mingtao0622@163.com)

    DOI:10.3788/IRLA20240285

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology