Acta Optica Sinica, Volume. 30, Issue 10, 2817(2010)
CMOS Compatible Self-Aligned Micromachined Thermopile IR Detector
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Xu Dehui, Xiong Bin, Wang Yuelin. CMOS Compatible Self-Aligned Micromachined Thermopile IR Detector[J]. Acta Optica Sinica, 2010, 30(10): 2817
Paper Information
Category: Physical Optics
Received: Jun. 22, 2010
Accepted: --
Published Online: Oct. 24, 2012
The Author Email: Dehui Xu (dehuixu@mail.sim.ac.cn)
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