[1] Zhou B K, Gao Y Z, Chen T R[M]. Principle of laser(2014).

[2] Chen H, Zhang S L. Microchip Nd∶YAG dual-frequency laser interferometer for displacement measurement[J]. Optics Express, 29, 6248-6256(2021).

[3] Quenelle R. Nonlinearity in interferometric measurements[J]. Hewlett-Packard Journal, 34, 10(1983).

[4] Hou W M, Qiu H F. The influence of elliptical polarization of Zeeman-laser upon the heterodyne phase comparing interferometry[J]. Acta Metrologica Sinica, 199-202(1988).

[5] Hou W M, Zhao X B. Drift of nonlinearity in the heterodyne interferometer[J]. Precision Engineering, 16, 25-35(1994).

[6] Bobroff N. Residual errors in laser interferometry from air turbulence and nonlinearity[J]. Applied Optics, 26, 2676-2682(1987).

[7] Stone J A, Howard L P. A simple technique for observing periodic nonlinearities in Michelson interferometers[J]. Precision Engineering, 22, 220-232(1998).

[8] Zhang Z P, Yang X F. Application of laser heterodyne interference technology in lithography[J]. Laser ＆ Optoelectronics Progress, 59, 0922017(2022).

[9] Yang S, Zhang S L. The frequency split phenomenon in a HeNe laser with a rotational quartz plate in its cavity[J]. Optics Communications, 68, 55-57(1988).

[10] Zhang S L, Sen Y, Wu M X. He-ne dual-frequency laser with quartz crystal tuning[P].

[11] Zhang S, Yang S, Wu M et al. Quartz crystal tuning HeNe double frequency laser[P].

[12] Zhang S L, Li K L, Wu M X et al. The pattern of mode competition between two frequencies produced by mode split technology by tuning of the cavity length[J]. Optics Communications, 90, 279-282(1992).

[13] Zhang S L, Xiao Y, Li Y. Dual-refraction dual-frequency Zeeman laser device with stable frequency difference and its method for stabilizing frequency difference[P].

[14] Zhou L, Zhang S, Guo H et al. Precision controlling of frequency difference for elastic-stress birefringence He-Ne dual-frequency lasers[J]. Chinese Physics Letters, 24, 3141-3144(2007).

[15] Guo J H, Shen S, Jiang J H et al. Study on polarization state of a He Ne laser with a activity plate in its cavity[J]. Acta Optica Sinica, 16, 32-36(1996).

[16] Zong X B. Tuning analysis of frequency splitting laser and its application in arbitrary wave plate measurement[D](2005).

[17] Guo J H, Shen S, Jiang J H et al. Study on beat frequency of a He-Ne laser with an activity plate in its cavity[J]. Acta Optica Sinica, 16, 716-720(1996).

[18] Zhang S L, Jin Y Y, Fu J et al. Mode suppression, its elimination, and generation of small frequency differences in birefringence He-Ne lasers[J]. Optical Engineering, 40, 594-597(2001).

[19] Zhang S L, Han Y M, Jin Y Y et al. Birefringent dual frequency laser without frequency difference locking and its frequency difference accuracy control method[P].

[20] Zhang S L[M]. What can I do without innovation? What can I do without application: a laser precision measuring instrument that You have never seen before(2021).

[21] Zhang S L, Zhu S S, Li Y. A method for generating and assigning frequency difference of HeNe double frequency laser[P].

[22] Zhang B, Long X W, Liu J P et al. Lamb-dip frequency-stabilized He-Ne laser with an integrated cavity made of zerodur(Ⅰ): structure and techniques[J]. Acta Optica Sinica, 31, 0814005(2011).