Infrared and Laser Engineering, Volume. 53, Issue 10, 20240243(2024)
Study on the electrical properties of superlattice influenced by the thickness of GaSb substrate
Figures & Tables(10)
Fig. 5. Structure diagram of n doped InAs/GaSb type Ⅱ superlattice film
Fig. 6. Structure diagram of p doped InAs/GaSb type Ⅱ superlattice film
Fig. 7. (a) The electrical characteristics of n doped InAs/GaSb type Ⅱ superlattice film, it indicates that the change of carrier concentration with different thinkness of GaSb substrate; (b) The electrical characteristics of n doped InAs/GaSb type Ⅱ superlattice film, it is the change of mobility with different thinkness of GaSb substrate
Fig. 8. The electrical characteristics of p doped InAs/GaSb type Ⅱ superlattice film. (a) indicates that the change of carrier concentration with different thinkness of GaSb substrate; (b) is the change of mobility with different thinkness of GaSb substrate
Table 1. Hall test results of n doped InAs/GaSb type Ⅱ superlattice film with different thinkness of GaSb substrate
View tableView in ArticleTable 1. Hall test results of n doped InAs/GaSb type Ⅱ superlattice film with different thinkness of GaSb substrate
GaSb thickness/μm Carrier type Carrier concentration/cm−3 Mobility/ cm2·V−1·s−1 606 n 1.7201 ×10161.0585 ×104306 n 1.5016 ×10161.2664 ×104206 n 1.4205 ×10161.2805 ×104120 n 1.3687 ×10161.2796 ×104
Table 2. Hall test results of p doped InAs/GaSb type Ⅱ superlattice film with different thinkness of GaSb substrate
View tableView in ArticleTable 2. Hall test results of p doped InAs/GaSb type Ⅱ superlattice film with different thinkness of GaSb substrate
GaSb thickness/μm Carrier type Carrier concentration/ cm−3 Mobility/ cm2·V−1·s−1 606 p 5.3391 ×10162074.1 306 p 4.5341 ×10162273.2 206 p 4.4628 ×10162287.8 120 p 4.1900 ×10162230.0
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Shupei JIN, Yunong HU, Peng ZHOU, Ming LIU. Study on the electrical properties of superlattice influenced by the thickness of GaSb substrate[J]. Infrared and Laser Engineering, 2024, 53(10): 20240243
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Received: Jun. 3, 2024
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Published Online: Dec. 13, 2024
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