International Journal of Extreme Manufacturing, Volume. 4, Issue 4, 42005(2022)

Mass transfer techniques for large-scale and high-density microLED arrays

[in Chinese]1,2, [in Chinese]1,2,3, [in Chinese]1,2, [in Chinese]1,2, [in Chinese]1,2, [in Chinese]1,2, [in Chinese]1,2, [in Chinese]1,2, [in Chinese]1,2, [in Chinese]1,2, and [in Chinese]1,2、*
Author Affiliations
  • 1State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, People’s Republic of China
  • 2Flexible Electronics Research Center, Huazhong University of Science and Technology, Wuhan 430074, People’s Republic of China
  • 3College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, People’s Republic of China
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    Inorganic-based micro light-emitting diodes (microLEDs) offer more fascinating properties and unique demands in next-generation displays. However, the small size of the microLED chip (1-100 μm) makes it extremely challenging for high efficiency and low cost to accurately, selectively, integrate millions of microLED chips. Recent impressive technological advances have overcome the drawbacks of traditional pick-and-place techniques when they were utilized in the assembly of microLED display, including the most broadly recognized laser lift-off technique, contact micro-transfer printing (μTP) technique, laser non-contact μTP technique, and self-assembly technique. Herein, we firstly review the key developments in mass transfer technique and highlight their potential value, covering both the state-of-the-art devices and requirements for mass transfer in the assembly of the ultra-large-area display and virtual reality glasses. We begin with the significant challenges and the brief history of mass transfer technique, and expand that mass transfer technique is composed of two major techniques, namely, the epitaxial Lift-off technique and the pick-and-place technique. The basic concept and transfer effects for each representative epitaxial Lift-off and pick-and-place technique in mass transfer are then overviewed separately. Finally, the potential challenges and future research directions of mass transfer are discussed.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Mass transfer techniques for large-scale and high-density microLED arrays[J]. International Journal of Extreme Manufacturing, 2022, 4(4): 42005

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    Paper Information

    Category: Topical Review

    Received: Mar. 8, 2022

    Accepted: --

    Published Online: Mar. 4, 2023

    The Author Email: (yahuang@hust.edu.cn)

    DOI:10.1088/2631-7990/ac92ee

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