Infrared and Laser Engineering, Volume. 51, Issue 9, 20220531(2022)

High-efficiency and high-quality combined polishing method of zinc selenide crystal (invited)

Chao Yang1, Naiwen Zhang1, and Yang Bai2
Author Affiliations
  • 1School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, China
  • 2Changchun Institute of Optics, Fine Mechanis and Physics, Chinese Academy of Sciences, Changchun 130033, China
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    References(16)

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    [4] F Zhang, Q Yang, H Bian, et al. Fabrication of ZnSe microlens array for a wide infrared spectral region. IEEE Photonics Technology Letters, 32, 1327-1330(2020).

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    [8] D A Lucca, L Shao, C J Wetteland, et al. Subsurface damage in (100) ZnSe introduced by mechanical polishing. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 249, 907-910(2006).

    [9] Yunna Dong, Shuyun Cao. Study on polishing zinc selenide wafer. Diamond & Abrasives Engineering, 36, 83-86(2016).

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    [12] Ruiwen Geng, Qiming Xie, Wanqing Zhang, et al. Study on the material removal mechanism of ZnSe crystal via ultra-precision diamond turning. Infrared and Laser Engineering, 50, 20200403(2021).

    [13] [13] Bai Yang. Preparation of MR polishing fluid study on stability of removal function[D]. Changchun: University of Chinese Academy of Sciences (Changchun Institute of Optics, Fine Mechanics Physics, Chinese Academy of Sciences), 2012. (in Chinese)

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    [16] S Salzman, H J Romanofsky, G West, et al. Acidic magnetorheological finishing of infrared polycrystalline materials. Applied Optics, 55, 8448-8456(2016).

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    Chao Yang, Naiwen Zhang, Yang Bai. High-efficiency and high-quality combined polishing method of zinc selenide crystal (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220531

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    Paper Information

    Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface

    Received: Aug. 1, 2022

    Accepted: --

    Published Online: Jan. 6, 2023

    The Author Email:

    DOI:10.3788/IRLA20220531

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