Chinese Optics Letters, Volume. 22, Issue 3, 031302(2024)

Research progress of integrated optical gyroscope

Hongjie Guo1,2, Haifeng Liu1,3、*, Ming Lei4, Manqing Tan1, and Zhigang Song1
Author Affiliations
  • 1Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2College of Materials Science and Opto-electronics Technology, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Beijing Huairou Instruments and Sensors Co., Ltd., Beijing 101400, China
  • 4Beijing Institute of Automation and Control Equipment, Key Laboratory of National Defense Science and Technology of Inertial Technology, Beijing 100074, China
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    Figures & Tables(9)
    Configuration of interferometric optical gyroscopes.
    (a) IIOGs based on the silica platform from Shang et al.[9]. (b) IIOGs based on the silica platform from Wang et al.[8]. (c) IIOGs based on the silicon platform from Tran et al.[12].
    (a) Schematic diagram of the MIOC[16]. (b) Optimized block structure for the MIOC to improve the PER[16]. (c) Schematic diagram of a mixed-signal MIOC[15].
    Schematic diagram of the integrated waveguide coils. (a) SOI[21], (b) SiO2[22], (c) SiN[23].
    Schematic diagram of the resonant microcavity platform. (a) SiO2[26], (b) SiN[31], (c) polymer[34], (d) LRSPP[35], (e) CaF2[38], and (f) InP[36].
    Schematic diagram of CROW[46].
    (a) Schematic diagram of IROGs based on exceptional points[59]. (b) Schematic diagram of IROGs based on exceptional surfaces[63].
    • Table 1. Performance of the Integrated Coil Waveguides

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      Table 1. Performance of the Integrated Coil Waveguides

      PlatformInsertion LossLengthFootprintARWBias Drift
      SOI[21]29 mm0.42 mm251.3 deg/h
      SiO2[22]8.37 dB2.14 m121 cm21.26deg/h7.32 deg/h
      SiN[23]16.2 dB3 m12.57 cm28.52deg/h58.7 deg/h
    • Table 2. Research Progress of the Optical Resonant Cavities

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      Table 2. Research Progress of the Optical Resonant Cavities

      MaterialYearResearch TeamDiameter (cm)Q (106)Loss
      SiO2[30]2017Zhejiang University2.514.6
      SiO2[26]2013NIST0.28290
      SIN[31]2022Beihang University3.515.41.2 dB/m
      SIN[32]2021Beihang University1.62.64 dB/m
      Polymer[34]2022Southeast University210.118 dB/cm
      LRSPP[35]2014Southeast University40.14 dB/cm
      InP[36]2013Politecnico di Bari2.60.970.45 dB/cm
      CaF2[37]2007California Institute of Technology100,000
      CaF2[38]2017Eowaves0.7> 100
      SOI[39]2012Massachusetts Institute of Technology0.492202.7 dB/m
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    Hongjie Guo, Haifeng Liu, Ming Lei, Manqing Tan, Zhigang Song. Research progress of integrated optical gyroscope[J]. Chinese Optics Letters, 2024, 22(3): 031302

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    Paper Information

    Category: Integrated Optics

    Received: Jun. 16, 2023

    Accepted: Oct. 27, 2023

    Published Online: Mar. 18, 2024

    The Author Email: Haifeng Liu (liuhaifeng@semi.ac.cn)

    DOI:10.3788/COL202422.031302

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