Chinese Optics Letters, Volume. 21, Issue 11, 113601(2023)

High-Q resonances in terahertz all-silicon metasurface with imperforated air-hole array

Qing Wang, Pengfei Wang, Jianjun Liu, Fangzhou Shu*, Guiming Pan, Zhongwei Jin, Xufeng Jing, and Zhi Hong**
Author Affiliations
  • Centre for THz Research, China Jiliang University, Hangzhou 310018, China
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    Figures & Tables(5)
    (a) Schematic diagram of an all-silicon terahertz metasurface consisting of periodic imperforated air-hole tetramers when normally illuminated by a terahertz wave polarized along the x-direction. (b) Unit cell of the metasurface. The periods of the unit cell are Px = Py = P = 300 µm. The depth of air-holes is denoted as t1, and the thickness of the substrate is t2. (c) SEM picture of one fabricated metasurface when r1 = 25 µm, r2 = 55 µm, and t1 = 150 µm.
    (a) Simulated transmittances of the metasurface with different r1, when r2 = 55 µm. (b)–(e) Near-field electric and magnetic field distributions of resonances f1 and f2 at 0.489 THz and 0.521 THz, when r1 = 25 µm. (f) Resonance frequencies of f1 and f2 with respect to r1. (g) Q-factors of f1 and f2 versus r1.
    (a) Dispersion curves of the four related TE and TM eigenmodes, as a function of k P/2π, when r1 = r2 = 55 µm, where k is a propagating constant. The inset shows the first Brillouin zone of the square lattice. (b) Electric (Ez) and magnetic (Hz) near-fields in the xy plane of the four modes at Γ = 0.
    (a), (c) Influence of air-hole depth t1 on the frequency and (b), (d) Q-factor of the resonances f1 and f2, when thickness of metasurface t = 200 µm.
    (a) Calculated and (b) measured transmittances of four metasurfaces. (c) and (d) Enlarged views of measured resonance f2 for the sample r1 = 40 µm (blue) and f1 for the sample r1 = 35 µm (yellow) and their Fano fitted curves (pink).
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    Qing Wang, Pengfei Wang, Jianjun Liu, Fangzhou Shu, Guiming Pan, Zhongwei Jin, Xufeng Jing, Zhi Hong. High-Q resonances in terahertz all-silicon metasurface with imperforated air-hole array[J]. Chinese Optics Letters, 2023, 21(11): 113601

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    Paper Information

    Category: Nanophotonics, Metamaterials, and Plasmonics

    Received: Feb. 24, 2023

    Accepted: Jun. 26, 2023

    Published Online: Nov. 6, 2023

    The Author Email: Fangzhou Shu (fzshu@cjlu.edu.cn), Zhi Hong (hongzhi@cjlu.edu.cn)

    DOI:10.3788/COL202321.113601

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