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Infrared and Laser Engineering, Volume. 48, Issue 5, 521001(2019)

Effects of aging treatment on properties of SiO2 thin films with different deposition technology

Jiang Yugang1,2、*, Liu Xiaoli3, Liu Huasong1,2, Wang Lishuan1,2, Li Shida1,2, Chen Dan1,2, Liu Dandan1,2, Jiang Chenghui1,2, and Ji Yiqin1,2
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  • 2[in Chinese]
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    Jiang Yugang, Liu Xiaoli, Liu Huasong, Wang Lishuan, Li Shida, Chen Dan, Liu Dandan, Jiang Chenghui, Ji Yiqin. Effects of aging treatment on properties of SiO2 thin films with different deposition technology[J]. Infrared and Laser Engineering, 2019, 48(5): 521001

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    Paper Information

    Received: Dec. 11, 2018

    Accepted: Jan. 21, 2019

    Published Online: Jun. 22, 2019

    The Author Email: Yugang Jiang (jygang_4089@163.com)

    DOI:10.3788/irla201948.0521001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology