High Power Laser Science and Engineering, Volume. 11, Issue 5, 05000e61(2023)

Effect of subsurface impurity defects on laser damage resistance of beam splitter coatings

Wenyun Du1,2, Meiping Zhu1,2,3,4、*, Jun Shi1,2,3, Tianbao Liu1,2, Jian Sun1, Kui Yi1, and Jianda Shao1,2,3,4
Author Affiliations
  • 1Laboratory of Thin Film Optics, Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, China
  • 3Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou, China
  • 4CAS Center for Excellence in Ultra-intense Laser Science, Shanghai, China
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    Figures & Tables(13)
    (a) Surface morphologies of a non-heat-treated substrate and substrates heat-treated at different temperatures. (b) The number of raised particles on the surface of the four samples. (c) Detailed dimensional information of particles at positions A, B and C on the surface of sample HB4.
    Depth profiles of (a) Al, (b) Fe and (c) Ce impurity elements characterized via TOF-SIMS.
    (a) Transmittance spectra, (b) measured XRD spectra and (c) coating stress measured after deposition (with an aging time of 45 days) of PLBS coatings.
    Typical O 1s spectra of (a) the high-n layer and low-n layers deposited at (b) 100°C, (c) 140°C and (d) 200°C.
    (a) Single-pulse damage probability as a function of the input fluence. (b) Normalized E-field intensity distribution in the PLBS coating.
    Typical damage morphologies of PLBS coatings.
    Comparison of micro-crack and crater-type morphologies.
    Simulated laser-induced temperature rise caused by (a) a HfOx particle, (b) a HfOx particle and CeO2 particles at 7 μm intervals, and (c) a HfOx particle and CeO2 particles at 1.4 μm intervals.
    Simulated laser-induced temperature rise caused by a HfOx particle and (a) a 10-nm-diameter CeO2 particle, (b) a 31-nm-diameter CeO2 particle and (c) a 31-nm-diameter Al2O3 particle.
    Simulated E-field distribution caused by (a) a 31-nm-diameter CeO2 nodule seed, (b) a 183-nm-diameter CeO2 nodule seed and (c) a 183-nm-diameter Al2O3 nodule seed.
    • Table 1. Detailed information of the blank substrates.

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      Table 1. Detailed information of the blank substrates.

      Sample numberHeat treatment temperature (°C)
      HB1/
      HB2100
      HB3140
      HB4200
    • Table 2. Detailed deposition temperatures of the four PLBS coatings.

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      Table 2. Detailed deposition temperatures of the four PLBS coatings.

      Deposition temperature (°C)
      LayerA1A2A3B1Physical thickness (nm)
      1Sublayer 1200140100140300.0
      Sublayer 2200200200140114.8
      2–7200200200140/
    • Table 3. Thermal and optical parameters of materials used in the simulation.

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      Table 3. Thermal and optical parameters of materials used in the simulation.

      MaterialDensity (g/cm3)Conductivity (W/(m $\cdot$ K))Heat capacity (J/(K $\cdot$ g))Refractive indexExtinction coefficient
      BK72.51[33]1.10[33]0.858[33]1.5050
      SiO22.20[34]1.00[34]0.750[34]1.4140
      HfO2[34]9.502.000.270//
      Al2O33.98[5]1.60[35]0.777[5]1.585[18]0
      HfO2–Al2O35.561.710.6321.6691.82 × 10–6
      HfOx9.502.000.2702.000[36]0.07[36]
      CeO2[7]7.602.000.3692.0000.20
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    Wenyun Du, Meiping Zhu, Jun Shi, Tianbao Liu, Jian Sun, Kui Yi, Jianda Shao. Effect of subsurface impurity defects on laser damage resistance of beam splitter coatings[J]. High Power Laser Science and Engineering, 2023, 11(5): 05000e61

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    Paper Information

    Category: Research Articles

    Received: Feb. 13, 2023

    Accepted: Apr. 25, 2023

    Posted: Apr. 26, 2023

    Published Online: Sep. 22, 2023

    The Author Email: Meiping Zhu (bree@siom.ac.cn)

    DOI:10.1017/hpl.2023.37

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