Optical system design of compact laser displacement sensor based on auto-collimation principle

Table 1. Comparison of direct and oblique laser triangular probe
View table
View in Article
Table 1. Comparison of direct and oblique laser triangular probe
直射式斜射式
测量范围大小
分辨力低高
结构尺寸小大
光能损失大小
被测对象表面较粗糙、散射性好表面高反射率

Table 2. Main technical indicators
View table
View in Article
Table 2. Main technical indicators
主要技术参数指标
成像波段/nm 650
入瞳直径/mm 4
视场角/（˚） 40
系统总长/mm 20
分辨力/μm 1
综合检测精度/μm ±2

Table 3. Aspheric coefficients
View table
View in Article
Table 3. Aspheric coefficients
级数非球面系数 $a_{m}$ /mm
0 $2.370 \times 10^{- 3}$
1 $1.985 \times 10^{- 3}$
2 $6.450 \times 10^{- 3}$
3 $3.328 \times 10^{- 4}$
4 $4.057 \times 10^{- 5}$

Table 4. Cylindricity error measurement results

View table

View in Article

Table 4. Cylindricity error measurement results

序号	回转角度/（°）	轴向行程/mm	测量值/mm	真值/mm	标准差/mm
1	0	50	0.039	0.039	0.001 05
2	40	100	0.041	0.040
3	80	150	0.040	0.040
4	120	200	0.041	0.040
5	160	250	0.041	0.039
6	200	300	0.039	0.040
7	240	350	0.040	0.041
8	280	400	0.041	0.040
9	320	450	0.039	0.039
10	360	500	0.041	0.040

Table 5. Parameter comparison of Keyence and auto-collimation laser triangular probe
View table
View in Article
Table 5. Parameter comparison of Keyence and auto-collimation laser triangular probe
主要技术参数 Keyence激光三角测头自准直激光三角测头
结构尺寸（系统总长）/mm >40 20
测量范围（被测距离）/mm 60 <40 >40
分辨力/μm 0.1 0.1 1
综合检测精度/μm 1 1 2

Tools

Get Citation

Copy Citation Text

Xinting ZHANG, Qianqian WU, Lei KANG. Optical system design of compact laser displacement sensor based on auto-collimation principle[J]. Journal of Applied Optics, 2023, 44(4): 720

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites