Optics and Precision Engineering, Volume. 14, Issue 5, 853(2006)
Analysis of system servo following error caused by alignment error of ESG
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YAN Ming, ZHANG Jun-an, WU Zuo-hua. Analysis of system servo following error caused by alignment error of ESG[J]. Optics and Precision Engineering, 2006, 14(5): 853
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Received: Dec. 22, 2005
Accepted: --
Published Online: Feb. 28, 2010
The Author Email: Ming YAN (mingyan6448@sina.com)
CSTR:32186.14.
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