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Chinese Optics Letters, Volume. 20, Issue 11, 113602(2022)

Fabrication of lithium niobate metasurfaces via a combination of FIB and ICP-RIE

Chunyan Jin1, Wei Wu1、*, Lei Cao1, Bofeng Gao1, Jiaxin Chen2, Wei Cai1、**, Mengxin Ren1,3、***, and Jingjun Xu1、****
Author Affiliations
  • 1Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, School of Physics and TEDA Applied Physics Institute, Nankai University, Tianjin 300071, China
  • 2Science and Technology on Electro-Optical Information Security Control Laboratory, Tianjin 300308, China
  • 3Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
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    Article index updated: Jun. 12, 2024

    Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.
    The article is cited by 20 article(s) from Web of Science.
    The article is cited by 3 article(s) CLP online library. (Some content might be in Chinese.)
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    Chunyan Jin, Wei Wu, Lei Cao, Bofeng Gao, Jiaxin Chen, Wei Cai, Mengxin Ren, Jingjun Xu, "Fabrication of lithium niobate metasurfaces via a combination of FIB and ICP-RIE," Chin.Opt.Lett. 20, 113602 (2022)

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    Paper Information

    Category: Nanophotonics, Metamaterials, and Plasmonics

    Received: Apr. 9, 2022

    Accepted: Jun. 10, 2022

    Posted: Jun. 13, 2022

    Published Online: Jul. 13, 2022

    The Author Email: Wei Wu (nkwuwei@nankai.edu.cn), Wei Cai (weicai@nankai.edu.cn), Mengxin Ren (ren_mengxin@nankai.edu.cn), Jingjun Xu (jjxu@nankai.edu.cn)

    DOI:10.3788/COL202220.113602

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology