Journal of Terahertz Science and Electronic Information Technology , Volume. 22, Issue 8, 908(2024)
Research progress of low-g MEMS inertial switch
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XIONG Zhuang, ZHANG Fengtian, XIE Jin, ZHANG Zhaoyun, YANG Jie, ZHAO Baolin. Research progress of low-g MEMS inertial switch[J]. Journal of Terahertz Science and Electronic Information Technology , 2024, 22(8): 908
Paper Information
Received: Jan. 2, 2023
Accepted: --
Published Online: Sep. 23, 2024
The Author Email: Baolin ZHAO (18799538@qq.com)
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