[1] [1] SIEW S Y, LI B, GAO F, et al. Review of silicon photonics technology and platform development[J].IEEE journal of lightwave technology, 2021, 39(13):4374-4389.

[2] [2] SUN J, TIMURDOGAN E, YAACOBI A, et al.Large-scale nanophotonic phased array[J]. Nature,2013, 493: 195-199.

[3] [3] CHRISTOPHER R D, NICOLAS K F, LAWRENCE L B. PDM-DQPSK silicon receiver with integrated monitor and minimum number of controls[J]. IEEE photonics technology letters, 2012, 24(8): 697-699.

[4] [4] XU M, CAI X. Advances in integrated ultra-wideband electrooptic modulators[J]. Optics express, 2022, 30(5):7253-7274.

[5] [5] LIU L, LIU N, ZHANG J, et al. High performance electro-optic modulator based on thin-film lithium niobate[J]. Optoelectronic letters, 2022, 18(10):0583-0587.

[6] [6] SUN J, TIMURDOGAN E, YAACOBI A, et al.Large-scale silicon photonic circuits for optical phased arrays[J]. IEEE journal of selected topics in quantum electronics, 2014, 20(4): 264-278.

[7] [7] WANG R, VASILIEV A, MUNEEB M, et al.III-V-on-silicon photonic integrated circuits for spectroscopic sensing in the 2–4 μm wavelength range[J].Sensors, 2017, 17(8): 1788.

[8] [8] CHEN X, LIU W, ZHANG Y, et al. Polarization-insensitive broadband 2×2 3 dB power splitter based on silicon-bent directional couplers[J]. Optics letters, 2017, 42(19): 3738-3740.

[9] [9] GUPTA R K, CHANDRAN S, DAS B K. Wave length-independent directional couplers for integrated silicon photonics[J]. Journal of lightwave technology,2017, 35(22): 4916-4923.

[10] [10] GOUDARZI K, KIM D, LEE H, et al. Ultra low loss broadband 1×2 optical power splitters with various splitting ratios[J]. Optics continuum, 2022, 1(9):1888-1895.

[11] [11] TAO S H, FANG Q, SONG J F, et al. Cascade wide-angle Y-junction 1×16 optical power splitter based on silicon wire waveguides on silicon-on-insulator[J]. Optics express, 2008, 16(26): 21456-21461.

[12] [12] RUIZ J L P, ALDAYA I, DAINESE P, et al. Design of compact arbitrary-ratio multimode power splitters based on topological derivative[J]. IEEE photonics technology letters, 2020, 32(18): 1187-1190.

[13] [13] SHIRAN H, LIBOIRON-LADOUCEUR O. Dual-mode broadband compact 2×2 optical power splitter using sub-wavelength metamaterial structures[J]. Optics express, 2021, 29(15): 23864-23876.

[14] [14] XIANG C, JIN W, BOWERS J E. Silicon nitride passive and active photonic integrated circuits: trends and prospects[J]. Photonics research, 2022, 10(6): A82-A96.

[15] [15] MU?OZ P, MICó G, BRU L A, et al. Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications[J]. Sensors, 2017, 17(9):2088.

[16] [16] WANG L, PENG H, ZHENG L, et al. Broadband and CMOS-compatible polarization splitter and rotator built on a silicon nitride-on-silicon multilayer platform[J].Applied optics, 2023, 62(4): 1046-1056.

[17] [17] LUKE K, DUTT A, POITRAS B C, et al. Overcoming Si3N4 film stress limitations for high quality factor ring resonators[J]. Optics express, 2013, 21(19):22829-22833.

[18] [18] PFEIFFER H P M, LIU J, RAJA S A, et al. Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins[J]. Optica, 2018, 5(7): 884-892.

[19] [19] PORCEL A G M, SCHEPERS F, EPPING P J, et al.Two-octave spanning supercontinuum generation in stoichiometric silicon nitride waveguides pumped at telecom wavelengths[J]. Optics express, 2017, 25(2):1542-1554.

[20] [20] NGUYEN V H, KIM I K, SEOK T J. Low-loss and broadband silicon photonic 3-dB power splitter with enhanced coupling of shallow-etched rib waveguides[J].Applied sciences, 2020, 10(13): 4507.

[21] [21] ZHU J, CHAO Q, HUANG H, et al. Compact, broadband, and low-loss silicon photonic arbitrary ratio power splitter using adiabatic taper[J]. Applied optics,2021, 60(2): 413-416.

[22] [22] WILMART Q, EL DIRANI H, TYLER N, et al. A versatile silicon-silicon nitride photonics platform for enhanced functionalities and applications[J]. Applied sciences,2019, 9(2): 255.

[23] [23] ZHANG B, CHEN W, WANG P, et al. Particle swarm optimized polarization beam splitter using metasurface-assisted silicon nitride Y-junction for mid-infrared wavelengths[J]. Optics communications, 2019, 451:186-191.

[24] [24] YE C, DAI D. Ultra-compact broadband 2×2 3 dB power splitter using a subwavelength-grating-assisted asymmetric directional coupler[J]. Journal of lightwave technology, 2020, 38(8): 2370-2375.

[25] [25] LIN Z, SHI W. Broadband, low-loss silicon photonic Y-junction with an arbitrary power splitting ratio[J].Optics express, 2019, 27(10): 14338-14343.

[26] [26] WANG Z, LIU Y, WANG Z, et al. Ultra-broadband 3 dB power splitter from 1.55 to 2 μm wave band[J]. Optics letters, 2021, 46(17): 4232-4235.

[27] [27] MAO D, WANG Y, EL-FIKY E, et al. Adiabatic coupler with design-intended splitting ratio[J]. Journal of lightwave technology, 2019, 37(24): 6147-6155.

[28] [28] CHEN Y, XIAO J. Ultracompact and broadband silicon-based polarization-independent 1×2 power splitter using a shallowly etched multimode interference coupler[J]. Journal of the optical society of America B,2021, 38(10): 3064-3070.

[29] [29] WANG J, LIU H, ZHANG Y, et al. Study on polarization-independent optical power splitter with designable splitting ratio[J] Laser & optoelectronics progress,2023, 60(17): 1723001.

[30] [30] GONZáLEZ-ANDRADE D, GUERBER S,DURáN-VALDEIGLESIAS E, et al. Ultra-wideband dual-polarization silicon nitride power splitter based on modal engineered slot waveguides[J]. Optics letters,2020, 45(2): 527-530.