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Spectroscopy and Spectral Analysis, Volume. 33, Issue 2, 527(2013)

The Deposition of Elements in the Process of Laser Ablation of Silicon

WANG Shao-peng1,*... FENG Guo-ying1, DUAN Tao2 and HAN Jing-hua3 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    WANG Shao-peng, FENG Guo-ying, DUAN Tao, HAN Jing-hua. The Deposition of Elements in the Process of Laser Ablation of Silicon[J]. Spectroscopy and Spectral Analysis, 2013, 33(2): 527

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    Paper Information

    Received: Sep. 25, 2012

    Accepted: --

    Published Online: Mar. 27, 2013

    The Author Email: Shao-peng WANG (shaopeng_w@163.com)

    DOI:10.3964/j.issn.1000-0593(2013)02-0527-04

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology