Acta Optica Sinica, Volume. 43, Issue 15, 1500003(2023)

High-Precision Measurement Technology and Instrument with Laser Differential Confocal Interference

Shuai Yang, Lirong Qiu, Liang Tang, Zheng Yang, Jian Cui, Yun Wang, and Weiqian Zhao*
Author Affiliations
  • Key Laboratory of Complex-Field Intelligent Exploration, Ministry of Industry and Information Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
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    Shuai Yang, Lirong Qiu, Liang Tang, Zheng Yang, Jian Cui, Yun Wang, Weiqian Zhao. High-Precision Measurement Technology and Instrument with Laser Differential Confocal Interference[J]. Acta Optica Sinica, 2023, 43(15): 1500003

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    Paper Information

    Category: Reviews

    Received: Mar. 30, 2023

    Accepted: May. 9, 2023

    Published Online: Aug. 3, 2023

    The Author Email: Zhao Weiqian (zwq669@126.com)

    DOI:10.3788/AOS230752

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