Acta Optica Sinica, Volume. 43, Issue 15, 1500003(2023)
High-Precision Measurement Technology and Instrument with Laser Differential Confocal Interference
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Shuai Yang, Lirong Qiu, Liang Tang, Zheng Yang, Jian Cui, Yun Wang, Weiqian Zhao. High-Precision Measurement Technology and Instrument with Laser Differential Confocal Interference[J]. Acta Optica Sinica, 2023, 43(15): 1500003
Category: Reviews
Received: Mar. 30, 2023
Accepted: May. 9, 2023
Published Online: Aug. 3, 2023
The Author Email: Zhao Weiqian (zwq669@126.com)