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Acta Optica Sinica, Volume. 33, Issue 10, 1031001(2013)

Spectroscopic Ellipsometry Characterization of Hydrogenated Amorphous Silicon Thin Film

He Jian1、*, Li Wei2, Xu Rui1, Guo Anran1, Qi Kangcheng1, and Jiang Yadong2
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    He Jian, Li Wei, Xu Rui, Guo Anran, Qi Kangcheng, Jiang Yadong. Spectroscopic Ellipsometry Characterization of Hydrogenated Amorphous Silicon Thin Film[J]. Acta Optica Sinica, 2013, 33(10): 1031001

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    Paper Information

    Category: Thin Films

    Received: Apr. 8, 2013

    Accepted: --

    Published Online: Sep. 6, 2013

    The Author Email: Jian He (drhejian@gmail.com)

    DOI:10.3788/aos201333.1031001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology