[1] [1] LU J J, YUAN Q, SUN X P, et al.Research of the polarization aberration on Smith prism［J］.Physics Procedia, 2011, 19:447-455.

[5] [5] ICHMOTO K, SHINODA K, YAMAMOTO T, et al.Photopolarimetric measurement system of mueller matrix with dual rotating waveplates［J］.Publ Natl Astron Obs Japan, 2006, 9:11-19.

[8] [8] KYEA J, MCINTYREB G, NORIHIROC Y, et al.Polarization aberration analysis in optical lithography systems［J］.Optical Microlithography, 2006, 36(7):1553-1559.

[10] [10] CHENAULT D B, PEZZANITI J L, CHIPMAN R A.Mueller matrix algorithms［J］.Polarization Analysis and Measurement, 1992, 1746:231-246.

[11] [11] PEZZANITI J L, CHIPMAN R A.Mueller matrix imaging polarimetry［J］.Optical Engineering, 1995, 34(6):1558-1568.

[12] [12] YUN G, CRABTREE K, CHIPMAN R A.Three-dimensional polarization ray tracing and diattenuation calculation［J］.SPIE OSA, 2010, 7652:76521X1-76521X7.

[13] [13] YUN G, CHIPMAN R A.Three-dimensional polarization ray tracing, retardance［J］.SPIE OSA, 2010, 7652:76521W1-76521W7.