Ultra-short-pulse high-average-power megahertz-repetition-rate coherent extreme-ultraviolet light source

Robert Klas; Alexander Kirsche; Martin Gebhardt; Joachim Buldt; Henning Stark; Steffen Hädrich; Jan Rothhardt; Jens Limpert

doi:10.1186/s43074-021-00028-y

PhotoniX, Volume. 2, Issue 1, 4(2021)

Ultra-short-pulse high-average-power megahertz-repetition-rate coherent extreme-ultraviolet light source

Robert Klas1...2,*, Alexander Kirsche1,2, Martin Gebhardt1,2, Joachim Buldt1, Henning Stark1, Steffen Hädrich3, Jan Rothhardt1,2,4, and Jens Limpert1,24 |Show fewer author(s)

Author Affiliations

¹Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-University Jena, Albert-Einstein-Str. 15, 07745 Jena, Germany

²Helmholtz-Institute Jena, Fröbelstieg 3, 07743 Jena, Germany

³Active Fiber Systems GmbH, Ernst-Ruska-Ring 17, 07745 Jena, Germany

⁴Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Str. 7, 07745 Jena, Germany

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Robert Klas, Alexander Kirsche, Martin Gebhardt, Joachim Buldt, Henning Stark, Steffen Hädrich, Jan Rothhardt, Jens Limpert. Ultra-short-pulse high-average-power megahertz-repetition-rate coherent extreme-ultraviolet light source[J]. PhotoniX, 2021, 2(1): 4

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Paper Information

Category: Research Articles

Received: Jan. 19, 2021

Accepted: Apr. 11, 2021

Published Online: Jul. 10, 2023

The Author Email: Klas Robert (robert.klas@uni-jena.de)

DOI:10.1186/s43074-021-00028-y

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

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