Acta Optica Sinica, Volume. 39, Issue 11, 1123001(2019)

SiON-Based Cyclic Arrayed Waveguide Grating Routers with Improved Loss Uniformity

Shuxin Wang1, Tingting Lang2, Guangyi Song1, and Jianjun He1、*
Author Affiliations
  • 1State Key Laboratory of Modern Optical Instrumentation, Center for Integrated Optoelectronics, College of Optical Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China
  • 2College of Optical and Electronic Technology, China Jiliang University, Hangzhou, Zhejiang 310018, China
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    Figures & Tables(12)
    Designed waveguide. (a) Cross section; (b) simulated field distribution of TM polarization
    Desired far field distribution of the designed and the detailed structure of the auxiliary waveguides. (a) Desired waveguide array with auxiliary waveguides (expected sinc field distribution in the output of a single array waveguide and the flat-topped field distribution in the output image plane are indicated in the figure); (b) detailed structure of auxiliary waveguides
    Field distribution with the conventional design and optimal design at the image plane
    Microscope pictures of the fabricated AWGR. (a) AWGR with auxiliary waveguides; (b) AWGR without auxiliary waveguides
    Pictures of the fabricated waveguides. (a) Microscope picture of the connection area of the waveguide array with auxiliary waveguides and the output FPR; (b) SEM image of the SiON waveguide cross section
    Transmission spectra of the designed 7×7 AWGR with auxiliary waveguides. (a) Edge input channel; (b) central input channel
    Transmission spectra of the conventional 7×7 AWGR. (a) Edge input channel; (b) central input channel
    Insertion loss for all output channels of the two 7×7 AWGRs. (a) Edge input channel; (b) central input channel
    Transmission spectra of each input channel when light is input backward
    Insertion loss comparation when light is input forward and backward
    • Table 1. Parameters of the 7×7 AWGR

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      Table 1. Parameters of the 7×7 AWGR

      ParameterValue
      Number of channels7
      Central wavelength, λc /nm1550
      Channel spacing, Δλ /nm3.20
      Free spectral range, FSR /nm22.40
      Diffraction order, m57
      Length increment, ΔL /μm58.50
      Pitch of adjacent arrayed waveguides, da /μm5
      Pitch of adjacent input/output waveguides, dr /μm4
      Length of FPR, R /μm138.55
      Number of arrayed waveguides, Nwg31
    • Table 2. Summary of the research on AWGRs

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      Table 2. Summary of the research on AWGRs

      YearMaterialNumber of channelsChannel spacing /GHzInsertion loss /dBNon-uniformity /dBCrosstalk /dBSize /(mm×mm)
      2006[21]SiO232504.650.923048×80
      2008[7]Polymer82002.501.40< 2545×14.5
      2009[14]SiO264505.401.402359×62
      2015[17]SOI88001.1010
      2018[20]SOI152000.4615
      This paperSiON74003.820.88181×1.25
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    Shuxin Wang, Tingting Lang, Guangyi Song, Jianjun He. SiON-Based Cyclic Arrayed Waveguide Grating Routers with Improved Loss Uniformity[J]. Acta Optica Sinica, 2019, 39(11): 1123001

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    Paper Information

    Category: Optical Devices

    Received: May. 14, 2019

    Accepted: Jul. 15, 2019

    Published Online: Nov. 6, 2019

    The Author Email: He Jianjun (jjhe@zju.edu.cn)

    DOI:10.3788/AOS201939.1123001

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