Piezoelectrics & Acoustooptics, Volume. 42, Issue 5, 644(2020)
Design and Simulation of a Novel SAW Triaxial Acceleration Sensor
[1] [1] KANG A,ZHANG C,JI X,et al.SAW-RFID enabled temperature sensor[J].Sensors and Actuators A-physical,2013,201:105-113.
[2] [2] TAO R,HASAN S A,WANG H Z,et al.Bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors[J]. Scientific Reports,2018, 8(1):9052.
[3] [3] WANG T,MU X,RANDLES A B,et al.Diaphragm shape effect on the sensitivity of surface acoustic wave based pressure sensor for harsh environment[J]. Appl Phys Lett,2015, 107(12): 123501.
[4] [4] OISHI M,HAMASHIMA H,KONDOH J,et al.Measurement of cantilever vibration using impedance-loaded surface acoustic wave sensor[J].Jpn J Appl Phys,2016,55(7):07KD061-07KD066.
[5] [5] WANG W,HUANG Y,LIU X,et al.Surface acoustic wave acceleration sensor with high sensitivity incorporating ST-X quartz cantilever beam[J].Smart Materials and Structures,2015, 24(1): 015015-7.
[6] [6] LI B,YASSINE O,KOSEL J.A surface acoustic wave passive and wireless sensor for magnetic fields,temperature, and humidity[J]. IEEE Sensors Journal,2015,15(1):453-462.
[7] [7] NICOLAY P,AUBERT T.A numerical method to derive accurate temperature coefficients of material constants from high-temperature SAW measurements: application to langasite[J].IEEE Transactions on Ultrasonics Ferroelectrics & Frequency Control,2013,60(10):2137-2141.
[8] [8] AHMADI S, HASSANI F,KORMAN C, et al. Characterization of multi- and single-layer structure SAW sensor [gas sensor][C]//Vienna, Austria:IEEE Sensors, 2004:1129-1132.
[9] [9] SAKHAROV S,NAUMENKO N,ZABELIN A,et al.Characterization of langasite for application in high temperature SAW sensors[J]. Internaltional Ultrasonics Symposium, 2011: 2289-2292.
Get Citation
Copy Citation Text
GUO Xinrong, ZHANG Yongwei, TAN Qiulin, ZHANG Wendong. Design and Simulation of a Novel SAW Triaxial Acceleration Sensor[J]. Piezoelectrics & Acoustooptics, 2020, 42(5): 644
Received: Apr. 13, 2020
Accepted: --
Published Online: Apr. 21, 2022
The Author Email: