Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312017(2023)
MEMS Optical Acoustic Sensor
Fig. 1. Schematic diagram. (a)MEMS optical and acoustic sensor based on microstructured fiber grating; (b) fiber Bragg grating[12]
Fig. 2. Schematic diagram of optical fiber interferometer acoustic sensitivity principle. (a) MI; (b) SI; (c) MZI; (d) FPI
Fig. 5. Schematic diagram of optical fiber ultrasonic sensors for ultrasonic detection[47]
Fig. 6. Sectional and physical drawings of a small hydrophone based on photonic crystal film[52]
Fig. 7. Schematic and physical drawings of a fiber-optic Fabry-Perot acoustic sensor based on a multilayer graphene film approximately 100 nm thick[53]
Fig. 9. Fiber FPI microphone. (a) Components used for assembling the bionic directional microphone; (b) cross-section view of the microphone head; (c) photograph of the as-prepared bionic directional microphone[65]
Fig. 10. Physical diagram of coupled single-channel and double-channel semi-buried optical waveguide cavities[21]
Fig. 11. Schematic of novel photo-acoustic sensor based on a polymer spherical microcavity fiber-optic Fizeau interferometer[73]
Fig. 12. Optical fiber acoustic sensor based on planar concave polymer micro-resonant cavity. (a) Schematic diagram; (b) optical fiber micro-resonator sensor structure[6]
Fig. 13. FPE type filmless optical microphone. (a) Sensing schematic diagram; (b) sound pressure sensitivity curve[76]
Fig. 14. Experiment on sound pressure sensitive mechanism. (a) Profile of FPE on plane A-A; (b) mechanical structure drawing of FPE; (c) detection principle of acoustic detection structure[78]
Fig. 15. Micro-fiber-optic acoustic sensor based on high quality factor FPR. (a) Physical picture; (b) sensor head size diagram[22]
Fig. 16. Optical contact process of FPR[22]
Fig. 17. High temperature resistance test system of all-optical membrane-free fiber-optic acoustic sensor[80]
Fig. 18. Fiber F-P cavity based on silica glass direct bonding. (a) Bath "sandwich" F-P cavity; (b) image of fiber-optic acoustic sensor[81]
Fig. 19. Optical resolution photoacoustic microscopy images of mouse ears obtained in vivo[6]
Fig. 20. Photographs of physical models. (a) Ridge-like bulk; (b) misplaced rectangular bulk[83]
Fig. 21. Images of two physical models. (a) Ridge-like bulk; (b) misplaced rectangular bulk[83]
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Yongqiu Zheng, Jiamin Chen, Xinyu Zhao, Jiandong Bai, Liyun Wu, Chenyang Xue. MEMS Optical Acoustic Sensor[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312017
Category: Instrumentation, Measurement and Metrology
Received: Oct. 8, 2022
Accepted: Nov. 16, 2022
Published Online: Feb. 13, 2023
The Author Email: Xue Chenyang (xuechenyang@nuc.edu.cn)