Infrared and Laser Engineering, Volume. 48, Issue 8, 803003(2019)
Design of microlens array of infrared two-band laminated structure detector
[6] [6] Dong Xiaochun, Du Chunlei, Chen Bo, et al. The simulation analysis for photolithography process of microlens array[J]. Micronano Electronic Technology, 2003, 12: 39-42. (in Chinese)
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Xu Zhengkui, Li Xiaobin, Le Lizhu, Yu Zhenlong, He Jun, Wang Chunxing. Design of microlens array of infrared two-band laminated structure detector[J]. Infrared and Laser Engineering, 2019, 48(8): 803003
Category: 红外技术及应用
Received: Mar. 11, 2019
Accepted: Apr. 21, 2019
Published Online: Sep. 3, 2019
The Author Email: Zhengkui Xu (xzkkm@163.com)