Journal of Applied Optics, Volume. 43, Issue 4, 760(2022)

Mold design and pre-compensation of precision molding for diffractive optical elements

Yunlong ZHANG... Mingyin JIAO, Zhibin WANG*, Feng ZHANG and Zheng ZHANG |Show fewer author(s)
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  • [in Chinese]
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    Figures & Tables(11)
    Schematic of diffractive profile from optical design
    Schematic diagram of molding process parameters
    Diagram of integer part for DOE
    Simulation design of mold and its compensation principle
    Surface shape of diffractive profile mold
    Molded diffractive sample and filling state of its diffractive band
    Comparison of molded surface shape of elements and theoretical surface shape
    • Table 1. Molding process parameters and meanings

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      Table 1. Molding process parameters and meanings

      序号参数含义
      1T1模压温度
      2T2模压结束温度
      3T3缓冷结束温度
      4T4保压结束时温度
      5T5最终冷却温度
      6ST1均温时间
      7Vcooling缓冷速率
      8P1模压压力
      9P2保压压力1
      10P3保压压力2
      11PT1P1阶段持续时间
      12PT2P2阶段持续时间
      13PT3P3阶段持续时间
    • Table 2. Design parameters of diffractive profile

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      Table 2. Design parameters of diffractive profile

      参数参数
      CC0n12.7781
      k0n21
      A−2.300081e-5λ00.01
      B2.428109e-7C1−7.64024e-4
      C4.104299e-10C26.36616e-7
      D−2.101422e-12HOR1
    • Table 3. Parameters of diffractive profile after simulation and compensation

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      Table 3. Parameters of diffractive profile after simulation and compensation

      参数参数
      CC1.53e-10n12.7781
      k1.97e-18n21
      A4.4335e-4λ00.01
      B−1.3974e-5C1−7.64024e-4
      C1.5318e-7C26.36616e-7
      D−5.6902e-10
    • Table 4. Parameter values of molding process for optimized diffractive optical elements

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      Table 4. Parameter values of molding process for optimized diffractive optical elements

      参数参数
      T1/℃235P1/kN0.2
      T2/℃235P2/kN0.1
      T3/℃180P3/kN0.1
      T4/℃100PT1/s80
      T5/℃50PT2/s100
      ST1/s1 000PT3/s80
      Vcooling/℃/s0.1
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    Yunlong ZHANG, Mingyin JIAO, Zhibin WANG, Feng ZHANG, Zheng ZHANG. Mold design and pre-compensation of precision molding for diffractive optical elements[J]. Journal of Applied Optics, 2022, 43(4): 760

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    Paper Information

    Category: OPTICAL ELEMENT AND FABRICATION

    Received: --

    Accepted: --

    Published Online: Aug. 10, 2022

    The Author Email: WANG Zhibin (wang10310@126.com)

    DOI:10.5768/JAO202243.0405002

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