The dynamic model and inverse model of a piezoceramic actuator were proposed to improve its control precision in a precision position system. According to the Weierstrass approximation theorem, the polynomials f(·) and g(·) in the Duhem function was developed, and the dynamic modeling of nonlinear parameters of the piezoceramic actuator was given by using recursive least squares to identify the model parameters and polynomial coefficients in the Duhem model. Then, an inverse dynamic modeling of the piezoceramic actuator was established based on identified results to simplify the unknown parameter computation process greatly. Finally, the dynamic inverse compensation was incorporated in a closed-loop PID controller to control the piezoceramic actuator. Experimental results indicate that the maximum absolute error with the inverse compensation is less than 0.8 μm and that with the inverse compensation and PID is less than 40 nm in an amplitude range of 200 μm. The experimental result shows that the proposed identification scheme has improved the nonlinear characteristic of the piezoceramic actuator effectively.